Problem amtetcher SNF 2004-07-21 11:41:14: view window needs to be cleaned
yetao at snf.stanford.edu
yetao at snf.stanford.edu
Wed Jul 21 11:41:15 PDT 2004
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Shutdown amtetcher SNF 2004-07-17 16:05:39: "RF gen is off"
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Problem amtetcher SNF 2004-07-21 11:41:14: view window needs to be cleaned
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can hardly see wafers inside.
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Shutdown amtetcher SNF 2004-07-17 16:05:39: "RF gen is off"
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Problem amtetcher SNF 2004-07-21 11:41:14: view window needs to be cleaned
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