Shutdown amtetcher SNF 2004-07-25 00:28:27: Arching in tray 1

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jul 26 14:27:13 PDT 2004


Cleaned tray 1.  I had been trying to optimize the clean steps in the Standby recipe (#2) by lowering the flow of NF3 and reducing etch time.  Returned NF3 flows and etch times to values prior to seeing the arcing.  Ran a test with no problems.




More information about the amtetcher-pcs mailing list