Shutdown amtetcher SNF 2004-07-28 07:31:09: Arching in tray 2

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jul 28 10:08:59 PDT 2004


Cleaned arc marks on trays 2.  Found one of the wafers in the tray was not installed properly; only 3 of the 4 clips were engaged. The chamber was also left vented at atmosphere.  It took awhile to pump down.




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