Shutdown amtetcher SNF 2004-07-28 07:31:09: Arching in tray 2

[eenriquez at snf.stanford.edu]

Cleaned arc marks on trays 2.  Found one of the wafers in the tray was not installed properly; only 3 of the 4 clips were engaged. The chamber was also left vented at atmosphere.  It took awhile to pump down.