Comment amtetcher SNF 2004-07-28 14:45:31: Replaced dummies with cleaned wafers
latta at snf.stanford.edu
latta at snf.stanford.edu
Wed Jul 28 14:45:31 PDT 2004
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Shutdown amtetcher SNF 2004-07-28 07:31:09: Arching in tray 2
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Comment amtetcher 2004-04-29 11:09:02: Ran clean for 60 mins
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Shutdown amtetcher SNF 2004-07-28 07:31:09: Arching in tray 2
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Comment amtetcher 2004-04-29 11:09:02: Ran clean for 60 mins
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