From eenriquez at snf.stanford.edu Tue Jun 1 09:30:22 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Jun 2004 09:30:22 -0700 Subject: Problem amtetcher 2004-05-30 14:44:09: some soot on tray3,6 Message-ID: Cleaned soot off trays 3 and 6. Noticed that during the pass week, the problem trays had been 2,3 and 6. Swapped tray 1 with 6, tray 4 with 3 and tray 5 with 2. From jnee at snf.stanford.edu Wed Jun 2 15:44:16 2004 From: jnee at snf.stanford.edu (jnee at snf.stanford.edu) Date: Wed, 2 Jun 2004 15:44:16 -0700 Subject: Shutdown amtetcher 2004-06-02 15:44:16: arcing trays 2 & 4 Message-ID: No arcing marks seen before run. Arcing marks seen after run. From cbaxter at snf.stanford.edu Wed Jun 2 20:36:16 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 2 Jun 2004 20:36:16 -0700 Subject: Shutdown amtetcher 2004-06-02 15:44:16: arcing trays 2 & 4 Message-ID: cleaned arcing on trays 2 and 4 From vossough at snf.stanford.edu Fri Jun 4 10:24:21 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Fri, 4 Jun 2004 10:24:21 -0700 Subject: Shutdown amtetcher 2004-06-04 10:24:20: Tray #4has Arcing signs. Message-ID: From eenriquez at snf.stanford.edu Fri Jun 4 15:01:21 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 Jun 2004 15:01:21 -0700 Subject: Shutdown amtetcher 2004-06-04 10:24:20: Tray #4has Arcing signs. Message-ID: Cleaned burn marks from tray 3,4 and 6. For an experiment to minimize arcing, I adjusted tray's 2-6 to minimize the top gap. Please do not remove trays 2,3,4,5,6. Load your wafers in tray 1 only. I will check for signs of arcing on trays 2-6 next week. From mislam at snf.stanford.edu Mon Jun 7 09:01:40 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Mon, 7 Jun 2004 09:01:40 -0700 Subject: Problem amtetcher 2004-06-07 09:01:38: Arc marks Message-ID: After my run was completed found arc mark on the upper corner of tray #3 and # 4. Both mark on the same corner. Also a little arc mark on try #5. From eenriquez at snf.stanford.edu Mon Jun 7 16:01:06 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 7 Jun 2004 16:01:06 -0700 Subject: Problem amtetcher 2004-06-07 09:01:38: Arc marks Message-ID: Cleaned burn marks from trays 3,4 and 5. Replaced all tray # 4's plastic insulator and wafer clips. For the past month, tray 4 has "arced" the most (7 x) followed by tray #3 (4 x), trays #2and #6 (2x). From hanjun at snf.stanford.edu Tue Jun 8 19:27:14 2004 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Tue, 8 Jun 2004 19:27:14 -0700 Subject: Comment amtetcher 2004-06-08 19:27:13: log book paper run out Message-ID: parameters read normal for my run. From mislam at snf.stanford.edu Thu Jun 10 11:06:25 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Thu, 10 Jun 2004 11:06:25 -0700 Subject: Shutdown amtetcher 2004-06-10 11:06:23: Arc mark tray #4 Message-ID: after completion of my run found arcing mark on tray#4 on the latch. From eenriquez at snf.stanford.edu Thu Jun 10 15:44:45 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 10 Jun 2004 15:44:45 -0700 Subject: Shutdown amtetcher 2004-06-10 11:06:23: Arc mark tray #4 Message-ID: Cleaned arc marks. Swapped tray 4 with 1. From naiqian at snf.stanford.edu Fri Jun 11 10:17:30 2004 From: naiqian at snf.stanford.edu (naiqian at snf.stanford.edu) Date: Fri, 11 Jun 2004 10:17:30 -0700 Subject: Shutdown amtetcher 2004-06-11 10:17:29: tray3,4 have arc sign Message-ID: From latta at snf.stanford.edu Fri Jun 11 11:16:52 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jun 2004 11:16:52 -0700 Subject: Comment amtetcher 2004-06-08 19:27:13: log book paper run out Message-ID: Paper replaced and more on the way. Also, cleaned out used runsheets to 1/1/2004. From eenriquez at snf.stanford.edu Fri Jun 11 12:01:03 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Jun 2004 12:01:03 -0700 Subject: Shutdown amtetcher 2004-06-11 10:17:29: tray3,4 have arc sign Message-ID: Cleaned arc marks from trays 3,4 and 5. Placed kapton tape on the hexode around the latch opening and the bottom of the latch of trays 3 and 4. From bwacker at snf.stanford.edu Tue Jun 15 13:22:45 2004 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Tue, 15 Jun 2004 13:22:45 -0700 Subject: Shutdown amtetcher 2004-06-15 13:22:44: Arcing Message-ID: Hi, Tray #2 has burnt clamp, arcing. Barbara From eenriquez at snf.stanford.edu Tue Jun 15 16:03:54 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 15 Jun 2004 16:03:54 -0700 Subject: Shutdown amtetcher 2004-06-15 13:22:44: Arcing Message-ID: Cleaned tray #2 and put kapton tape around tray latch opening. From vossough at snf.stanford.edu Wed Jun 16 00:17:26 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Wed, 16 Jun 2004 00:17:26 -0700 Subject: Problem amtetcher 2004-06-16 00:17:26: burnt resist Message-ID: I used my usual process 5, to etch oxide and the resist was burnt on 1/3 of my wafers. Noticed high power during most of the etch (~1300W). It is usually around 1100W in order to maintain -530V of bias. From eenriquez at snf.stanford.edu Wed Jun 16 10:30:59 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Jun 2004 10:30:59 -0700 Subject: Shutdown amtetcher 2004-06-16 10:30:58: Arcing on all trays Message-ID: 45 min process From mcvittie at snf.stanford.edu Wed Jun 16 19:14:17 2004 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Wed, 16 Jun 2004 19:14:17 -0700 Subject: Shutdown amtetcher 2004-06-16 10:30:58: Arcing on all trays Message-ID: To minimize arcing, I want to make the following process/ procedure changes. 1. Reduce bias voltage to 500V. The testing is still being done but I expect an etch rate reduction of only 5%. 2. In loading the trays, I want you to minimize the hortizonal gap between tthe plastic pieces at the top of the trays. To do this, you need to pull up on tthe bottom of the tray as you close clip/ clamp the tray top. Thanks, Jim From latta at snf.stanford.edu Thu Jun 17 15:36:56 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 17 Jun 2004 15:36:56 -0700 Subject: Comment amtetcher 2004-06-17 15:36:55: Clean program run for 01:00:00. Message-ID: From cbaxter at snf.stanford.edu Thu Jun 17 20:56:20 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 17 Jun 2004 20:56:20 -0700 Subject: Problem amtetcher 2004-06-16 00:17:26: burnt resist Message-ID: From ychliu at snf.stanford.edu Fri Jun 18 03:15:35 2004 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: Fri, 18 Jun 2004 03:15:35 -0700 Subject: Shutdown amtetcher 2004-06-18 03:15:35: arcing spot, tray 3 Message-ID: From eenriquez at snf.stanford.edu Fri Jun 18 16:23:12 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 18 Jun 2004 16:23:12 -0700 Subject: Shutdown amtetcher 2004-06-18 03:15:35: arcing spot, tray 3 Message-ID: Clean up arcing marks. Installed 2 new parts for testing. On tray #3, a lexan piece that covers the underside of the latch. On tray #4, a graphite cap strap. Ran test with Jim Mc with no problems. From hanjun at snf.stanford.edu Sat Jun 19 19:43:21 2004 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Sat, 19 Jun 2004 19:43:21 -0700 Subject: Problem amtetcher 2004-06-19 19:43:20: hexide temperature reads higher Message-ID: Hexode temperature reads 34C. (20~21C usually) Also, the etch rate seems lower (about 20%) than usual. (#3) From hanjun at snf.stanford.edu Sun Jun 20 00:15:45 2004 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Sun, 20 Jun 2004 00:15:45 -0700 Subject: Problem amtetcher 2004-06-20 00:15:45: trace of arcing at tray #4 Message-ID: Top notch of tray #4 has the trace of arcing, even though the tray itself is clean. It didn't cause any further arcing during three of my runs for 1~7 minutes. Should you use the etcher, take your own risk and keep an eye on this area! (I don't shut it down for now, 'cause it runs normal and people are lined up to use this machine.. Next user, please be aware of it and report if there is any strange thing observed.. Thanks!) From eenriquez at snf.stanford.edu Mon Jun 21 10:51:28 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Jun 2004 10:51:28 -0700 Subject: Problem amtetcher 2004-06-20 00:15:45: trace of arcing at tray #4 Message-ID: Cleaned arc marks. From eenriquez at snf.stanford.edu Mon Jun 21 10:54:32 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Jun 2004 10:54:32 -0700 Subject: Problem amtetcher 2004-06-19 19:43:20: hexide temperature reads higher Message-ID: Temperature is 26 C at 9:30. Etch rate is lower because the bias voltage setting has been lowered to -500V. From eenriquez at snf.stanford.edu Tue Jun 22 12:44:39 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 22 Jun 2004 12:44:39 -0700 Subject: Comment amtetcher SNF 2004-06-22 12:44:38: Installed graphite part Message-ID: Installed a graphite piece on the latch of position #4. Ran a 30 minute etch at a bias of -565 V with no arcing. From malekos at snf.stanford.edu Wed Jun 23 20:47:49 2004 From: malekos at snf.stanford.edu (malekos at snf.stanford.edu) Date: Wed, 23 Jun 2004 20:47:49 -0700 Subject: Comment amtetcher SNF 2004-06-23 20:47:48: no program 15 Message-ID: deleted program 5 and when I tried to copy program 15 back in its place it said there was no program 15. I left program 6 in program 5's place.