From eenriquez at snf.stanford.edu Mon Mar 1 07:06:43 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Mar 2004 07:06:43 -0800 Subject: Comment amtetcher 2004-02-25 12:25:02: Reported Temp too low problem Message-ID: From eenriquez at snf.stanford.edu Mon Mar 1 08:30:28 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Mar 2004 08:30:28 -0800 Subject: Problem amtetcher 2004-02-28 17:36:36: Message-ID: Cleaned up arc marks. ran test. no problems. From eenriquez at snf.stanford.edu Mon Mar 1 08:32:30 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Mar 2004 08:32:30 -0800 Subject: Problem amtetcher 2004-02-29 20:28:37: Arching in tray 4 Message-ID: cleaned up arc marks. ran test. rechecked tray. no problems. From latta at snf.stanford.edu Thu Mar 11 10:58:31 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 11 Mar 2004 10:58:31 -0800 Subject: Problem amtetcher 2004-03-11 10:58:30: hex rotation jerky Message-ID: Also, got several annoying alarms about the hex not rotating when it clearly did. One last thing- when I lifted the bell jar there was an unusual bang. I did not see any damage.... From latta at snf.stanford.edu Thu Mar 11 13:29:40 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 11 Mar 2004 13:29:40 -0800 Subject: Comment amtetcher 2004-03-11 13:29:40: Plasma cleaned Message-ID: 2 x prog 1 (120min total) From cbaxter at snf.stanford.edu Thu Mar 11 17:42:53 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 11 Mar 2004 17:42:53 -0800 Subject: Comment amtetcher 2004-03-11 13:29:40: Plasma cleaned Message-ID: From cbaxter at snf.stanford.edu Thu Mar 11 17:43:08 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 11 Mar 2004 17:43:08 -0800 Subject: Problem amtetcher 2004-03-11 10:58:30: hex rotation jerky Message-ID: lube hex From mislam at snf.stanford.edu Mon Mar 15 07:22:27 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Mon, 15 Mar 2004 07:22:27 -0800 Subject: Shutdown amtetcher 2004-03-15 07:22:26: Found arcing marks tray 1 & 2 Message-ID: Problem was not reported by previous user. Machine should have been in shutdown. From eenriquez at snf.stanford.edu Mon Mar 15 08:20:59 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Mar 2004 08:20:59 -0800 Subject: Shutdown amtetcher 2004-03-15 07:22:26: Found arcing marks tray 1 & 2 Message-ID: Cleaned up arc marks on trays 1 & 2. From eenriquez at snf.stanford.edu Mon Mar 15 16:12:03 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Mar 2004 16:12:03 -0800 Subject: Comment amtetcher 2004-03-15 16:12:02: Experiment to eliminate arcing Message-ID: I have put kapton tape around the area of the latch slot on trays #2 and #4. The purpose of the tape is to eliminate the arcing problem. I have noticed that most of the arcing has occured on sharp corners around the half moon slot. The plan is to put tape on each of the trays as they fail. If we get arcing on the trays with tape, I will either take all the tape off if it arcs on an area covered with tape, or add more tape if it arcs on an uncovered spot. I have spoken with Jim Mcvitty about this and he didn't have any problems with it. Please let me know if you have any concerns about this. From jnee at snf.stanford.edu Thu Mar 18 13:59:04 2004 From: jnee at snf.stanford.edu (jnee at snf.stanford.edu) Date: Thu, 18 Mar 2004 13:59:04 -0800 Subject: Shutdown amtetcher 2004-03-18 13:59:04: Tray 2 shows sign of arcing Message-ID: Tray 2 has a slightly loose latch, which could possibly contribute to the arcing? Trays 2 & 4 have Kapton tape, but only Tray2 show signs of arcing. From eenriquez at snf.stanford.edu Thu Mar 18 15:48:41 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 18 Mar 2004 15:48:41 -0800 Subject: Shutdown amtetcher 2004-03-18 13:59:04: Tray 2 shows sign of arcing Message-ID: Cleaned slight arcing marks. Put kapton tape on area that arced. From yiching at snf.stanford.edu Fri Mar 19 11:42:26 2004 From: yiching at snf.stanford.edu (yiching at snf.stanford.edu) Date: Fri, 19 Mar 2004 11:42:26 -0800 Subject: Problem amtetcher 2004-03-19 11:42:26: machine not in normal state Message-ID: display shows: "NOT READY LOW BASE PLT TMP" RUN button not lit. From cbaxter at snf.stanford.edu Fri Mar 19 18:57:08 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 19 Mar 2004 18:57:08 -0800 Subject: Problem amtetcher 2004-03-19 11:42:26: machine not in normal state Message-ID: reboot system. display back to normal From cbaxter at snf.stanford.edu Sun Mar 21 15:46:05 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 21 Mar 2004 15:46:05 -0800 Subject: Comment amtetcher 2004-03-21 15:46:04: system shutdown during the power glitch Message-ID: power tool back up From yiching at snf.stanford.edu Mon Mar 22 15:28:13 2004 From: yiching at snf.stanford.edu (yiching at snf.stanford.edu) Date: Mon, 22 Mar 2004 15:28:13 -0800 Subject: Problem amtetcher 2004-03-22 15:27:52: machine turned off by itself Message-ID: during a run, prog #3. From cbaxter at snf.stanford.edu Mon Mar 22 16:40:23 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 22 Mar 2004 16:40:23 -0800 Subject: Problem amtetcher 2004-03-22 15:27:52: machine turned off by itself Message-ID: tool is running fine From phimmer at snf.stanford.edu Wed Mar 24 12:39:54 2004 From: phimmer at snf.stanford.edu (phimmer at snf.stanford.edu) Date: Wed, 24 Mar 2004 12:39:54 -0800 Subject: Shutdown amtetcher 2004-03-24 12:39:53: low cold wtr lvl Message-ID: amt is no longer in hold condition display reads low cold water level From eenriquez at snf.stanford.edu Wed Mar 24 14:41:53 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 24 Mar 2004 14:41:53 -0800 Subject: Shutdown amtetcher 2004-03-24 12:39:53: low cold wtr lvl Message-ID: the system reset for the second time today. From ychliu at snf.stanford.edu Wed Mar 24 16:10:59 2004 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: Wed, 24 Mar 2004 16:10:59 -0800 Subject: Shutdown amtetcher 2004-03-24 16:10:58: arcing spots Message-ID: on topleft of tray 3 and topright of tray 4 From cbaxter at snf.stanford.edu Wed Mar 24 20:23:41 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 24 Mar 2004 20:23:41 -0800 Subject: Shutdown amtetcher 2004-03-24 16:10:58: arcing spots Message-ID: cleaned up arcing on tray#2,3,4,5 From latta at snf.stanford.edu Thu Mar 25 15:38:24 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 25 Mar 2004 15:38:24 -0800 Subject: Comment amtetcher 2004-03-25 15:38:24: Tray 3@'s latch not flush Message-ID: From xzhuan1 at snf.stanford.edu Fri Mar 26 12:11:36 2004 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Fri, 26 Mar 2004 12:11:36 -0800 Subject: Shutdown amtetcher 2004-03-26 12:11:35: machine powered itself off Message-ID: Machine powered itself off before etch started. It wouldn't power on and showed "cold water level low" error message. My wafers are still inside the chamber. From phimmer at snf.stanford.edu Fri Mar 26 15:11:45 2004 From: phimmer at snf.stanford.edu (phimmer at snf.stanford.edu) Date: Fri, 26 Mar 2004 15:11:45 -0800 Subject: Shutdown amtetcher 2004-03-26 15:11:45: amt shutdown Message-ID: during seasoning etch after low water level was fixed amt shut down again From eenriquez at snf.stanford.edu Fri Mar 26 15:58:11 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Mar 2004 15:58:11 -0800 Subject: Shutdown amtetcher 2004-03-26 15:11:45: amt shutdown Message-ID: Restarted system From eenriquez at snf.stanford.edu Fri Mar 26 15:58:22 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Mar 2004 15:58:22 -0800 Subject: Shutdown amtetcher 2004-03-26 12:11:35: machine powered itself off Message-ID: restarted system From elferradi at snf.stanford.edu Fri Mar 26 20:08:47 2004 From: elferradi at snf.stanford.edu (elferradi at snf.stanford.edu) Date: Fri, 26 Mar 2004 20:08:47 -0800 Subject: Shutdown amtetcher 2004-03-26 20:08:47: AMT RESET Message-ID: amt rest itself after venting From cbaxter at snf.stanford.edu Fri Mar 26 21:15:18 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 26 Mar 2004 21:15:18 -0800 Subject: Shutdown amtetcher 2004-03-26 20:08:47: AMT RESET Message-ID: reboot system From xzhuan1 at snf.stanford.edu Sat Mar 27 10:47:11 2004 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Sat, 27 Mar 2004 10:47:11 -0800 Subject: Problem amtetcher 2004-03-27 10:47:10: temperature too high Message-ID: hex reads 30 degrees, hot lp 40 degrees and cold lp 30 degrees! From naiqian at snf.stanford.edu Sat Mar 27 23:36:06 2004 From: naiqian at snf.stanford.edu (naiqian at snf.stanford.edu) Date: Sat, 27 Mar 2004 23:36:06 -0800 Subject: Problem amtetcher 2004-03-27 23:36:05: after enabling machine, find prgram 2 is not running Message-ID: the message is not correct. I disabled machine at once. From phimmer at snf.stanford.edu Sun Mar 28 11:36:44 2004 From: phimmer at snf.stanford.edu (phimmer at snf.stanford.edu) Date: Sun, 28 Mar 2004 11:36:44 -0800 Subject: Shutdown amtetcher 2004-03-28 11:36:42: AMT reset Message-ID: The AMT reset itself again From cbaxter at snf.stanford.edu Wed Mar 31 01:00:31 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 31 Mar 2004 01:00:31 -0800 Subject: Shutdown amtetcher 2004-03-28 11:36:42: AMT reset Message-ID: changed bad cpu and pcb power supply From cbaxter at snf.stanford.edu Wed Mar 31 01:01:23 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 31 Mar 2004 01:01:23 -0800 Subject: Problem amtetcher 2004-03-27 23:36:05: after enabling machine, find prgram 2 is not running Message-ID: changed alphanumeric pcb From cbaxter at snf.stanford.edu Wed Mar 31 01:01:37 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 31 Mar 2004 01:01:37 -0800 Subject: Problem amtetcher 2004-03-27 10:47:10: temperature too high Message-ID: From cbaxter at snf.stanford.edu Wed Mar 31 01:01:45 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 31 Mar 2004 01:01:45 -0800 Subject: Comment amtetcher 2004-03-25 15:38:24: Tray 3@'s latch not flush Message-ID: From cbaxter at snf.stanford.edu Wed Mar 31 01:01:53 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 31 Mar 2004 01:01:53 -0800 Subject: Comment amtetcher 2004-03-21 15:46:04: system shutdown during the power glitch Message-ID: From mislam at snf.stanford.edu Wed Mar 31 08:07:55 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Wed, 31 Mar 2004 08:07:55 -0800 Subject: Problem amtetcher 2004-03-31 08:07:53: Temp. setting high Message-ID: Hexode temp shows 30C instead of usual 20C. This would change all processes. Resist etch rate seems to be higher. Plasma color looks different. From vossough at snf.stanford.edu Wed Mar 31 10:06:11 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Wed, 31 Mar 2004 10:06:11 -0800 Subject: Problem amtetcher 2004-03-31 10:06:10: Flow error Message-ID: front panel displays: Err FL1 Wait PR Flow1 out limit before the start of the run. From eenriquez at snf.stanford.edu Wed Mar 31 13:14:04 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 31 Mar 2004 13:14:04 -0800 Subject: Problem amtetcher 2004-03-31 10:06:10: Flow error Message-ID: Re-entered correct system constants. From eenriquez at snf.stanford.edu Wed Mar 31 13:14:36 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 31 Mar 2004 13:14:36 -0800 Subject: Problem amtetcher 2004-03-31 08:07:53: Temp. setting high Message-ID: Re-entered correct temperature system constant.