Shutdown amtetcher 2004-03-26 12:11:35: machine powered itself off

xzhuan1 at snf.stanford.edu xzhuan1 at snf.stanford.edu
Fri Mar 26 12:11:36 PST 2004


Machine powered itself off before etch started. It wouldn't power on and showed "cold water level low" error message. My wafers are still inside the chamber.




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