Problem amtetcher 2004-03-31 08:07:53: Temp. setting high

mislam at snf.stanford.edu mislam at snf.stanford.edu
Wed Mar 31 08:07:55 PST 2004


Hexode temp shows 30C instead of usual 20C.
This would change all processes. Resist etch
rate seems to be higher. Plasma color looks 
different.




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