From daesung at snf.stanford.edu Sat May 1 19:31:10 2004 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Sat, 1 May 2004 19:31:10 -0700 Subject: Shutdown amtetcher 2004-05-01 19:31:10: Arching in tray 6 Message-ID: From eenriquez at snf.stanford.edu Mon May 3 09:18:54 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 3 May 2004 09:18:54 -0700 Subject: Shutdown amtetcher 2004-05-01 19:31:10: Arching in tray 6 Message-ID: Cleaned arcing in tray 6. Replaced an ardel insulator. Installed a grounding strap under the tray latch actuator. Also adjusted (lower) the bell jar grounding braid so that it touches the baseplate when the belljar is down. From ychliu at snf.stanford.edu Wed May 5 17:15:33 2004 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: Wed, 5 May 2004 17:15:33 -0700 Subject: Shutdown amtetcher 2004-05-05 17:15:33: RF Gen went off Message-ID: From cbaxter at snf.stanford.edu Wed May 5 18:14:05 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 5 May 2004 18:14:05 -0700 Subject: Shutdown amtetcher 2004-05-05 17:15:33: RF Gen went off Message-ID: power on rf From mislam at snf.stanford.edu Mon May 10 10:56:30 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Mon, 10 May 2004 10:56:30 -0700 Subject: Shutdown amtetcher 2004-05-10 10:56:30: Arc mark on Tray#4 Message-ID: 20 min into my run bias voltage started to fluctuate and at one point jumped to -575V. Stoped run and checked all trays. Tray#4 has an arc mark at the contact latch. From eenriquez at snf.stanford.edu Tue May 11 08:34:40 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 11 May 2004 08:34:40 -0700 Subject: Shutdown amtetcher 2004-05-10 10:56:30: Arc mark on Tray#4 Message-ID: Cleaned arc marks and re-adjusted belljar grounding. From daesung at snf.stanford.edu Thu May 13 22:53:54 2004 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Thu, 13 May 2004 22:53:54 -0700 Subject: Shutdown amtetcher 2004-05-13 22:53:53: Arching on tray 4 Message-ID: From eenriquez at snf.stanford.edu Fri May 14 11:33:44 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 14 May 2004 11:33:44 -0700 Subject: Shutdown amtetcher 2004-05-13 22:53:53: Arching on tray 4 Message-ID: Cleaned arc marks. Note: When installing the tray, please try to center the latch in the tray groove. From rfasch at snf.stanford.edu Mon May 17 10:41:17 2004 From: rfasch at snf.stanford.edu (rfasch at snf.stanford.edu) Date: Mon, 17 May 2004 10:41:17 -0700 Subject: Shutdown amtetcher 2004-05-17 10:41:17: arcing on tray4 Message-ID: arcing on tray 4. From eenriquez at snf.stanford.edu Mon May 17 12:12:39 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 May 2004 12:12:39 -0700 Subject: Shutdown amtetcher 2004-05-17 10:41:17: arcing on tray4 Message-ID: Cleaned up arc marks. Swapped tray #4 with #1. The last 4 arcing incidents have occured on tray #4. I want to see whether the problem is tray or station dependent. From vossough at snf.stanford.edu Tue May 18 05:32:54 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Tue, 18 May 2004 05:32:54 -0700 Subject: Problem amtetcher 2004-05-18 05:32:53: sign of arcing on tray #1 Message-ID: From vossough at snf.stanford.edu Tue May 18 05:37:40 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Tue, 18 May 2004 05:37:40 -0700 Subject: Shutdown amtetcher 2004-05-18 05:37:39: arcing on tray #1 Message-ID: From eenriquez at snf.stanford.edu Tue May 18 09:14:50 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 18 May 2004 09:14:50 -0700 Subject: Problem amtetcher 2004-05-18 05:32:53: sign of arcing on tray #1 Message-ID: Clean up arc marks and replaced all wafer clips (tray 1) From eenriquez at snf.stanford.edu Tue May 18 09:19:54 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 18 May 2004 09:19:54 -0700 Subject: Shutdown amtetcher 2004-05-18 05:37:39: arcing on tray #1 Message-ID: It looks like the arcing problem followed the tray. Remember this was the tray from #4 which arced 4x previously. Cleaned arc marks and replaced all clips on tray. If it still arcs, I will replace the tray ardel covers. From rohits at snf.stanford.edu Tue May 18 14:42:50 2004 From: rohits at snf.stanford.edu (rohits at snf.stanford.edu) Date: Tue, 18 May 2004 14:42:50 -0700 Subject: Comment amtetcher 2004-05-18 14:42:49: Tray 1 latch is not flush with the top Message-ID: From quickwin at snf.stanford.edu Wed May 19 21:18:40 2004 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Wed, 19 May 2004 21:18:40 -0700 Subject: Shutdown amtetcher 2004-05-19 21:18:39: arcing Message-ID: trays 2 and 4 From eenriquez at snf.stanford.edu Thu May 20 10:02:14 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 20 May 2004 10:02:14 -0700 Subject: Shutdown amtetcher 2004-05-19 21:18:39: arcing Message-ID: Arcing on tray 2,3,4 and 6. Cleaned off all arc marks. Repositioned all dummy wafers except for wafers in tray #5. From bwacker at snf.stanford.edu Tue May 25 11:22:32 2004 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Tue, 25 May 2004 11:22:32 -0700 Subject: Shutdown amtetcher 2004-05-25 11:22:31: Turbo pump is off on process2 Message-ID: From cbaxter at snf.stanford.edu Tue May 25 21:21:49 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 25 May 2004 21:21:49 -0700 Subject: Shutdown amtetcher 2004-05-25 11:22:31: Turbo pump is off on process2 Message-ID: ramp turbo at speed From cbaxter at snf.stanford.edu Tue May 25 21:22:01 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 25 May 2004 21:22:01 -0700 Subject: Comment amtetcher 2004-05-18 14:42:49: Tray 1 latch is not flush with the top Message-ID: From bwacker at snf.stanford.edu Wed May 26 13:59:38 2004 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Wed, 26 May 2004 13:59:38 -0700 Subject: Shutdown amtetcher 2004-05-26 13:59:36: Arcing Message-ID: The arcing is on tray2 and it is pretty bad. Barbara From cbaxter at snf.stanford.edu Wed May 26 19:55:09 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 26 May 2004 19:55:09 -0700 Subject: Shutdown amtetcher 2004-05-26 13:59:36: Arcing Message-ID: cleaned arcing on tray#2 From hanjun at snf.stanford.edu Thu May 27 11:02:03 2004 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Thu, 27 May 2004 11:02:03 -0700 Subject: Shutdown amtetcher 2004-05-27 11:02:03: arcing at the top clip of tray 6 Message-ID: From cbaxter at snf.stanford.edu Thu May 27 18:55:09 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 27 May 2004 18:55:09 -0700 Subject: Shutdown amtetcher 2004-05-27 11:02:03: arcing at the top clip of tray 6 Message-ID: cleaned up arcing on tray#6 From mislam at snf.stanford.edu Fri May 28 08:21:09 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Fri, 28 May 2004 08:21:09 -0700 Subject: Shutdown amtetcher 2004-05-28 08:21:08: Acr mark tray #2, not reported by last user Message-ID: After venting chamber to start my run, found tray #2 has heavy acring marks. Last user did not mention anything in the coral or log book. I do not see how one can miss it, unless trays were not inspected after the completion of last run. From cbaxter at snf.stanford.edu Fri May 28 19:03:27 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 28 May 2004 19:03:27 -0700 Subject: Shutdown amtetcher 2004-05-28 08:21:08: Acr mark tray #2, not reported by last user Message-ID: cleaned up arcing on tray#3 From seoung at snf.stanford.edu Sun May 30 14:44:09 2004 From: seoung at snf.stanford.edu (seoung at snf.stanford.edu) Date: Sun, 30 May 2004 14:44:09 -0700 Subject: Problem amtetcher 2004-05-30 14:44:09: some soot on tray3,6 Message-ID: I ran process 3 for 15minutes. After the process, I accidently found some burned stuff on the holders of tray 3,6 but didn't see any arcing during the process.