From mislam at snf.stanford.edu Sat Oct 2 18:19:00 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sat, 2 Oct 2004 18:19:00 -0700 Subject: Problem amtetcher SNF 2004-10-02 18:19:00: Arc mark on tray #4 Message-ID: From cbaxter at snf.stanford.edu Mon Oct 4 23:27:38 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 4 Oct 2004 23:27:38 -0700 Subject: Problem amtetcher SNF 2004-10-02 18:19:00: Arc mark on tray #4 Message-ID: cleaned arcing on tray#4 From eenriquez at snf.stanford.edu Tue Oct 5 12:21:33 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 5 Oct 2004 12:21:33 -0700 Subject: Shutdown amtetcher SNF 2004-10-05 12:21:32: Low DC bias Message-ID: DC bias only goes up to -430 volts (set point is -530) From eenriquez at snf.stanford.edu Tue Oct 5 15:09:54 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 5 Oct 2004 15:09:54 -0700 Subject: Shutdown amtetcher SNF 2004-10-05 12:21:32: Low DC bias Message-ID: Cleaned copper RF strap. DC bias is back up to normal. The RF bias on recipe 3 is -530 V at 1200 W. Before the strap clean, I was only able to get -460 V at max power. From weigao at snf.stanford.edu Wed Oct 6 14:36:51 2004 From: weigao at snf.stanford.edu (weigao at snf.stanford.edu) Date: Wed, 6 Oct 2004 14:36:51 -0700 Subject: Problem amtetcher SNF 2004-10-06 14:36:51: burn mark on tray 4 Message-ID: From eenriquez at snf.stanford.edu Wed Oct 6 15:25:27 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 6 Oct 2004 15:25:27 -0700 Subject: Problem amtetcher SNF 2004-10-06 14:36:51: burn mark on tray 4 Message-ID: Cleaned burn mark. From ycfu at snf.stanford.edu Tue Oct 12 16:15:38 2004 From: ycfu at snf.stanford.edu (ycfu at snf.stanford.edu) Date: Tue, 12 Oct 2004 16:15:38 -0700 Subject: Shutdown amtetcher SNF 2004-10-12 16:15:35: Message-ID: From cbaxter at snf.stanford.edu Tue Oct 12 18:17:09 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 12 Oct 2004 18:17:09 -0700 Subject: Shutdown amtetcher SNF 2004-10-12 16:15:35: Message-ID: cleaned arcing on tray#1. changed cathode ardel shield and two tray shield. From weigao at snf.stanford.edu Thu Oct 14 12:08:09 2004 From: weigao at snf.stanford.edu (weigao at snf.stanford.edu) Date: Thu, 14 Oct 2004 12:08:09 -0700 Subject: Problem amtetcher SNF 2004-10-14 12:08:08: low bias Message-ID: From cbaxter at snf.stanford.edu Thu Oct 14 18:16:47 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 14 Oct 2004 18:16:47 -0700 Subject: Shutdown amtetcher SNF 2004-10-14 18:16:46: low bias error Message-ID: From eenriquez at snf.stanford.edu Fri Oct 15 12:20:00 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 15 Oct 2004 12:20:00 -0700 Subject: Shutdown amtetcher SNF 2004-10-14 18:16:46: low bias error Message-ID: Ran a plasma clean (recipe 2 without conditioning) with all the trays removed. The dc bias came back up to normal. Cleaned the hexode with a wire brush to see if I could lower the amount of power required to generate the -530v bias. Result is that using the wire brush had no effect. Currently, running recipe 3 , puts out -535 vdc bias at ~ 1250 W after 4 minutes. From eenriquez at snf.stanford.edu Fri Oct 15 12:21:58 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 15 Oct 2004 12:21:58 -0700 Subject: Problem amtetcher SNF 2004-10-14 12:08:08: low bias Message-ID: Ran a plama clean without the trays. Now recipe puts out -530v at 1250 W after 4 minutes. From mislam at snf.stanford.edu Sat Oct 16 12:18:01 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sat, 16 Oct 2004 12:18:01 -0700 Subject: Problem amtetcher SNF 2004-10-16 12:18:00: Low DC Bias - 350V max Message-ID: From fengj at snf.stanford.edu Sat Oct 16 16:49:47 2004 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Sat, 16 Oct 2004 16:49:47 -0700 Subject: Shutdown amtetcher SNF 2004-10-16 16:49:45: Sign of Arcing in Trays #4 and #6 Message-ID: From eenriquez at snf.stanford.edu Mon Oct 18 09:42:22 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 18 Oct 2004 09:42:22 -0700 Subject: Shutdown amtetcher SNF 2004-10-16 16:49:45: Sign of Arcing in Trays #4 and #6 Message-ID: Cleaned small arc marks from tray 4. From eenriquez at snf.stanford.edu Mon Oct 18 09:45:08 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 18 Oct 2004 09:45:08 -0700 Subject: Problem amtetcher SNF 2004-10-16 12:18:00: Low DC Bias - 350V max Message-ID: Cleaned the hexode (trays removed) with an NF3 plasma for 10 minutes. Bias now is -535 V at 1150 W.