From beckwith at snf.stanford.edu Sun Sep 5 15:06:51 2004 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Sun, 5 Sep 2004 15:06:51 -0700 Subject: Comment amtetcher SNF 2004-09-05 15:06:50: what's up with the amt? Message-ID: I have not used this machine for a while, so I read the instructions, then I checked the program. Yikes! First off, has the base pressure been changed on all of the programs to .8? It used to be .2, as it says on page 5 of the operating instructions. If it is 8, why would you say "N" when programming this in? I used .2, hope that is OK. Also, the DC bias was programmed in as zero. I changed it to 530 only to find it doesn't work. It consistantly failed at ~475, maybe this is why someone put in zero? I ended up using 450. I also found theMax RF at 1300. Is this new? I changed it back to 1400 because that is what it said on the Etch Rates sheet. There are no blank log sheets in the binder or in the gowing room. The last log sheet filled out in the book is from July 20, 2004.There are no indications of any of this on those sheets. Also, the new shut down procedure is no where to be found, From sanli at snf.stanford.edu Mon Sep 6 18:00:23 2004 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: Mon, 6 Sep 2004 18:00:23 -0700 Subject: Problem amtetcher SNF 2004-09-06 18:00:23: hex cooling? Message-ID: This is the first time I'm seeing this. It "cooled" for 10 minutes then I aborted the program. It didn't turn on the plasma. I tried it again. Same thing. I don't know what it is. From eenriquez at snf.stanford.edu Tue Sep 7 07:58:13 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Sep 2004 07:58:13 -0700 Subject: Problem amtetcher SNF 2004-09-06 18:00:23: hex cooling? Message-ID: No problem found. From cmfaulkn at snf.stanford.edu Tue Sep 7 16:18:18 2004 From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu) Date: Tue, 7 Sep 2004 16:18:18 -0700 Subject: Problem amtetcher SNF 2004-09-07 16:18:18: signs of arcing on #4 latch Message-ID: From cbaxter at snf.stanford.edu Tue Sep 7 18:15:17 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 7 Sep 2004 18:15:17 -0700 Subject: Problem amtetcher SNF 2004-09-07 16:18:18: signs of arcing on #4 latch Message-ID: cleaned arcing on tray#4. From cmfaulkn at snf.stanford.edu Thu Sep 9 01:13:14 2004 From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu) Date: Thu, 9 Sep 2004 01:13:14 -0700 Subject: Shutdown amtetcher SNF 2004-09-09 01:13:13: arcing on tray 1 Message-ID: running process 3, burn mark at latch. From eenriquez at snf.stanford.edu Thu Sep 9 11:13:09 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 9 Sep 2004 11:13:09 -0700 Subject: Shutdown amtetcher SNF 2004-09-09 01:13:13: arcing on tray 1 Message-ID: cleaned up arc marks. Reduced pressure on step 2 of the standby recipe (recipe 2)from 70 mT to 65 mT. From okilic at snf.stanford.edu Thu Sep 9 22:47:38 2004 From: okilic at snf.stanford.edu (okilic at snf.stanford.edu) Date: Thu, 9 Sep 2004 22:47:38 -0700 Subject: Problem amtetcher SNF 2004-09-09 22:47:38: Arcing Message-ID: Arcing on top-left corner of bottommost wafer section. Looks like arcing is present on all visible trays. Was using program #3. From eenriquez at snf.stanford.edu Fri Sep 10 10:14:29 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 10 Sep 2004 10:14:29 -0700 Subject: Problem amtetcher SNF 2004-09-09 22:47:38: Arcing Message-ID: Not really arcing but plasma forming at the corners of the ardel insulator plates (also on the right-side of the view port). Increased the conditioning time (step 4) in recipe 2 (standby) from 2 min. to 8 min. Reran recipe #3 and I did not see any plasma on the ardel. From rfasch at snf.stanford.edu Mon Sep 13 17:12:02 2004 From: rfasch at snf.stanford.edu (rfasch at snf.stanford.edu) Date: Mon, 13 Sep 2004 17:12:02 -0700 Subject: Problem amtetcher SNF 2004-09-13 17:12:02: burn spots on tray 4 Message-ID: could not use the machine because of burning spots at tray 4 ! why does nobody report this kind of problems right after finishing of their etching? From hanjun at snf.stanford.edu Mon Sep 13 17:36:33 2004 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Mon, 13 Sep 2004 17:36:33 -0700 Subject: Shutdown amtetcher SNF 2004-09-13 17:36:32: what the previous user reported is arcing... Message-ID: From cbaxter at snf.stanford.edu Mon Sep 13 22:07:51 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 13 Sep 2004 22:07:51 -0700 Subject: Shutdown amtetcher SNF 2004-09-13 17:36:32: what the previous user reported is arcing... Message-ID: cleaned arcing on tray#4 From cbaxter at snf.stanford.edu Mon Sep 13 22:07:57 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 13 Sep 2004 22:07:57 -0700 Subject: Problem amtetcher SNF 2004-09-13 17:12:02: burn spots on tray 4 Message-ID: From okilic at snf.stanford.edu Sat Sep 18 18:53:03 2004 From: okilic at snf.stanford.edu (okilic at snf.stanford.edu) Date: Sat, 18 Sep 2004 18:53:03 -0700 Subject: Shutdown amtetcher SNF 2004-09-18 18:53:02: arcing Message-ID: tray #4 From eenriquez at snf.stanford.edu Mon Sep 20 11:12:26 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Sep 2004 11:12:26 -0700 Subject: Shutdown amtetcher SNF 2004-09-18 18:53:02: arcing Message-ID: Cleaned arc marks. Found out arcing occurs in the stanby recipe. Changed pressure in step 4 of recipe 2 from 60 mT to 45 mT. From yetao at snf.stanford.edu Tue Sep 21 09:48:41 2004 From: yetao at snf.stanford.edu (yetao at snf.stanford.edu) Date: Tue, 21 Sep 2004 09:48:41 -0700 Subject: Shutdown amtetcher SNF 2004-09-21 09:48:41: 3rd slot of first tray is burned due to broken wafer Message-ID: wafer was cracked during etching and it burned out the plastic piece. From eenriquez at snf.stanford.edu Tue Sep 21 12:57:58 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Sep 2004 12:57:58 -0700 Subject: Shutdown amtetcher SNF 2004-09-21 09:48:41: 3rd slot of first tray is burned due to broken wafer Message-ID: replaced burnt out ardel pieces. From weigao at snf.stanford.edu Wed Sep 22 14:29:27 2004 From: weigao at snf.stanford.edu (weigao at snf.stanford.edu) Date: Wed, 22 Sep 2004 14:29:27 -0700 Subject: Shutdown amtetcher SNF 2004-09-22 14:29:26: arcing Message-ID: From eenriquez at snf.stanford.edu Wed Sep 22 15:35:20 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Sep 2004 15:35:20 -0700 Subject: Shutdown amtetcher SNF 2004-09-22 14:29:26: arcing Message-ID: Replaced wafer clips (2nd electrode, tray #1) and electrode insulator. Swapped tray 1 with tray 2. From mislam at snf.stanford.edu Thu Sep 23 09:43:52 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Thu, 23 Sep 2004 09:43:52 -0700 Subject: Problem amtetcher SNF 2004-09-23 09:43:50: Small arc mark tray #4 Message-ID: From eenriquez at snf.stanford.edu Thu Sep 23 10:57:59 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Sep 2004 10:57:59 -0700 Subject: Problem amtetcher SNF 2004-09-23 09:43:50: Small arc mark tray #4 Message-ID: Not an arc mark. It was just a small dark spot on the tray. Cleaned off the spot. From weigao at snf.stanford.edu Fri Sep 24 18:08:01 2004 From: weigao at snf.stanford.edu (weigao at snf.stanford.edu) Date: Fri, 24 Sep 2004 18:08:01 -0700 Subject: Shutdown amtetcher SNF 2004-09-24 18:08:00: arcing Message-ID: From cbaxter at snf.stanford.edu Sat Sep 25 20:14:55 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 25 Sep 2004 20:14:55 -0700 Subject: Shutdown amtetcher SNF 2004-09-24 18:08:00: arcing Message-ID: cleaned arcing on tray#3 From okilic at snf.stanford.edu Sun Sep 26 15:20:26 2004 From: okilic at snf.stanford.edu (okilic at snf.stanford.edu) Date: Sun, 26 Sep 2004 15:20:26 -0700 Subject: Shutdown amtetcher SNF 2004-09-26 15:20:25: what is going on? Message-ID: Equipment was on Green. But when I came in, it was in "Vented" mode. Then I noticed that there is one dummy outside of chamber. Holder in Tray #2 is burnt out, because equipment was probably operated without any wafer in place. Similarly, a holder in Tray #3 has serious burn marks. From eenriquez at snf.stanford.edu Mon Sep 27 12:21:36 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 27 Sep 2004 12:21:36 -0700 Subject: Shutdown amtetcher SNF 2004-09-26 15:20:25: what is going on? Message-ID: ?? Replaced burnt out insulators and clips. Please verify that all wafers are installed before running the tool. Please leave a note or comment if you remove a wafer because of a burnt out clip or insulator.