Shutdown amtetcher SNF 2004-09-09 01:13:13: arcing on tray 1

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Sep 9 11:13:09 PDT 2004


cleaned up arc marks.  Reduced pressure on step 2 of the standby recipe (recipe 2)from 70 mT to 65 mT.




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