Problem amtetcher SNF 2004-09-09 22:47:38: Arcing

okilic at snf.stanford.edu okilic at snf.stanford.edu
Thu Sep 9 22:47:38 PDT 2004


Arcing on top-left corner of bottommost wafer section. Looks like arcing is present on all visible trays.
Was using program #3.




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