Shutdown amtetcher SNF 2004-09-18 18:53:02: arcing

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Sep 20 11:12:26 PDT 2004


Cleaned arc marks.  Found out arcing occurs in the stanby recipe.  Changed pressure in step 4 of recipe 2 from 60 mT to 45 mT.




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