Shutdown amtetcher SNF 2004-09-26 15:20:25: what is going on?

okilic at snf.stanford.edu okilic at snf.stanford.edu
Sun Sep 26 15:20:26 PDT 2004


Equipment was on Green. But when I came in, it was in "Vented" mode. Then I noticed that there is one dummy outside of chamber. Holder in Tray #2 is burnt out, because equipment was probably operated without any wafer in place. Similarly, a holder in Tray #3 has serious burn marks.




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