Shutdown amtetcher SNF 2004-09-26 15:20:25: what is going on?

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Sep 27 12:21:36 PDT 2004


??  Replaced burnt out insulators and clips.  Please verify that all wafers are installed before running the tool.  Please leave a note or comment if you remove a wafer because of a burnt out clip or insulator.




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