From eenriquez at snf.stanford.edu Mon Aug 1 14:07:42 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Aug 2005 14:07:42 -0700 Subject: Comment amtetcher SNF 2005-07-08 09:17:12: amt free from 11 am to 1 pm Message-ID: ok From eenriquez at snf.stanford.edu Mon Aug 1 15:37:56 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 1 Aug 2005 15:37:56 -0700 Subject: Comment amtetcher SNF 2005-08-01 15:37:55: Replaced window for the laser Message-ID: From king at snf.stanford.edu Tue Aug 2 16:26:48 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 2 Aug 2005 16:26:48 -0700 Subject: Problem amtetcher SNF 2005-08-02 16:26:48: AMT Low DC Bias Error Message-ID: Gets up to about 520V and then shuts off. Have not loaded wafers; conditioning run. From king at snf.stanford.edu Tue Aug 2 18:05:52 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 2 Aug 2005 18:05:52 -0700 Subject: Problem amtetcher SNF 2005-08-02 18:05:51: AMT- next error is HEAT EXCH OFF Message-ID: From cbaxter at snf.stanford.edu Tue Aug 2 20:08:53 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 2 Aug 2005 20:08:53 -0700 Subject: Problem amtetcher SNF 2005-08-02 18:05:51: AMT- next error is HEAT EXCH OFF Message-ID: Refill HX, prime systems, run standby recipe From cbaxter at snf.stanford.edu Tue Aug 2 23:26:03 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 2 Aug 2005 23:26:03 -0700 Subject: Problem amtetcher SNF 2005-08-02 16:26:48: AMT Low DC Bias Error Message-ID: Retune RF generator source match From jhpark9 at snf.stanford.edu Fri Aug 5 13:32:26 2005 From: jhpark9 at snf.stanford.edu (jhpark9 at snf.stanford.edu) Date: Fri, 5 Aug 2005 13:32:26 -0700 Subject: Problem amtetcher SNF 2005-08-05 13:32:26: pump down problem Message-ID: pump down failure due to manometer leak. please check this. Thank you From cbaxter at snf.stanford.edu Sat Aug 6 00:53:26 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 6 Aug 2005 00:53:26 -0700 Subject: Problem amtetcher SNF 2005-08-05 13:32:26: pump down problem Message-ID: system pump down fine. From djwong at snf.stanford.edu Wed Aug 10 17:07:12 2005 From: djwong at snf.stanford.edu (djwong at snf.stanford.edu) Date: Wed, 10 Aug 2005 17:07:12 -0700 Subject: Comment amtetcher SNF 2005-08-10 17:07:11: AMT Message-ID: The JOG sticks after every 1/6 rotation. Also, the viewing port needs cleaning. From latta at snf.stanford.edu Thu Aug 11 10:50:59 2005 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 11 Aug 2005 10:50:59 -0700 Subject: Shutdown amtetcher SNF 2005-08-11 10:50:59: alarm- turbo off Message-ID: I was just walking by.... From eenriquez at snf.stanford.edu Thu Aug 11 16:27:14 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 11 Aug 2005 16:27:14 -0700 Subject: Shutdown amtetcher SNF 2005-08-11 10:50:59: alarm- turbo off Message-ID: Restarted the turbo. Ran several etch cycles with no problem. Also noticed that the Pquest turbo was also off. Perhaps its just a coincidence. From iwjung at snf.stanford.edu Fri Aug 12 14:21:40 2005 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Fri, 12 Aug 2005 14:21:40 -0700 Subject: Shutdown amtetcher SNF 2005-08-12 14:21:39: arcing Message-ID: jog keeps alarming, manometer leak, arcing on right side of window near 5th column From eenriquez at snf.stanford.edu Fri Aug 12 16:07:16 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 12 Aug 2005 16:07:16 -0700 Subject: Shutdown amtetcher SNF 2005-08-12 14:21:39: arcing Message-ID: Cleaned the hexado shaft to From eenriquez at snf.stanford.edu Fri Aug 12 16:16:25 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 12 Aug 2005 16:16:25 -0700 Subject: Comment amtetcher SNF 2005-08-10 17:07:11: AMT Message-ID: Cleaned hexode shaft. Cleaned the view port. The "arcing" observed near the view port is "normal" and not really arcing. It is just a spot where the plasma density is higher. Jim Mc thinks its generated by a hollow cathode effect between the shield and the chamber wall. Perhaps there is an imperfection on the shied in that area. From eenriquez at snf.stanford.edu Fri Aug 12 16:16:40 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 12 Aug 2005 16:16:40 -0700 Subject: Comment amtetcher SNF 2005-08-01 15:37:55: Replaced window for the laser Message-ID: OK From mislam at snf.stanford.edu Sat Aug 13 13:05:42 2005 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sat, 13 Aug 2005 13:05:42 -0700 Subject: Problem amtetcher SNF 2005-08-13 13:05:41: Low dc bias problem Message-ID: DC bias can not get above -510V. Power stays below 1390W. Ran machine ok with DC bias -510V. From jhpark9 at snf.stanford.edu Mon Aug 15 14:16:21 2005 From: jhpark9 at snf.stanford.edu (jhpark9 at snf.stanford.edu) Date: Mon, 15 Aug 2005 14:16:21 -0700 Subject: Shutdown amtetcher SNF 2005-08-15 14:16:21: AMT has a problem. Message-ID: AMT was stopped while the bell was going up. Check it please. From cbaxter at snf.stanford.edu Mon Aug 15 18:54:52 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 15 Aug 2005 18:54:52 -0700 Subject: Shutdown amtetcher SNF 2005-08-15 14:16:21: AMT has a problem. Message-ID: changed blown fuse on lift hoise and power up system without a problem. From cbaxter at snf.stanford.edu Mon Aug 15 18:56:17 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 15 Aug 2005 18:56:17 -0700 Subject: Problem amtetcher SNF 2005-08-13 13:05:41: Low dc bias problem Message-ID: cleaned inductor on rf match, run recipe3 and bias is @ -530v From jhpark9 at snf.stanford.edu Tue Aug 16 15:18:35 2005 From: jhpark9 at snf.stanford.edu (jhpark9 at snf.stanford.edu) Date: Tue, 16 Aug 2005 15:18:35 -0700 Subject: Problem amtetcher SNF 2005-08-16 15:18:34: pump down failure Message-ID: Manometer leak error From djwong at snf.stanford.edu Tue Aug 16 15:22:09 2005 From: djwong at snf.stanford.edu (djwong at snf.stanford.edu) Date: Tue, 16 Aug 2005 15:22:09 -0700 Subject: Comment amtetcher SNF 2005-08-16 15:22:08: Message-ID: From cbaxter at snf.stanford.edu Tue Aug 16 16:20:22 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 16 Aug 2005 16:20:22 -0700 Subject: Problem amtetcher SNF 2005-08-16 15:18:34: pump down failure Message-ID: tighten monometer fitting. From sanli at snf.stanford.edu Thu Aug 18 11:20:20 2005 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: Thu, 18 Aug 2005 11:20:20 -0700 Subject: Shutdown amtetcher SNF 2005-08-18 11:20:18: turbo went off Message-ID: It does not do anything, only vent button is lit, and when I hit that alarm goes off and says: Not ready, turbo went off From eenriquez at snf.stanford.edu Thu Aug 18 16:09:01 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 18 Aug 2005 16:09:01 -0700 Subject: Shutdown amtetcher SNF 2005-08-18 11:20:18: turbo went off Message-ID: Restarted turbo and ran standby recipe. Noticed the PQuest turbo also went off. This is the second time that both turbos shut-off. From sanli at snf.stanford.edu Tue Aug 23 16:08:47 2005 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: Tue, 23 Aug 2005 16:08:47 -0700 Subject: Problem amtetcher SNF 2005-08-23 16:08:46: low DC bias Message-ID: I keeps giving this error message and shuts off the flow and theRF every few minutes. I made sure that all the trays are appropriately in position, but didn't make a difference. I did 10 min. seasoning before my etch without any incidence like this. I also observed minor arcing on tray 2. From cbaxter at snf.stanford.edu Tue Aug 23 16:25:39 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 23 Aug 2005 16:25:39 -0700 Subject: Problem amtetcher SNF 2005-08-23 16:08:46: low DC bias Message-ID: recipe was wrong. set rf to 1250watts From cbaxter at snf.stanford.edu Tue Aug 23 16:25:53 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 23 Aug 2005 16:25:53 -0700 Subject: Comment amtetcher SNF 2005-08-16 15:22:08: Message-ID: From riteshj at snf.stanford.edu Tue Aug 23 16:31:20 2005 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Tue, 23 Aug 2005 16:31:20 -0700 Subject: Shutdown amtetcher SNF 2005-08-23 16:31:20: Lwo DC BIAS problem, Message-ID: etch shuts down autmoatically aas DC bias is not able to reach its value From cbaxter at snf.stanford.edu Tue Aug 23 17:16:17 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 23 Aug 2005 17:16:17 -0700 Subject: Shutdown amtetcher SNF 2005-08-23 16:31:20: Lwo DC BIAS problem, Message-ID: i ran recipe #4 and bias is ok @-530 From king at snf.stanford.edu Wed Aug 24 19:55:46 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 24 Aug 2005 19:55:46 -0700 Subject: Problem amtetcher SNF 2005-08-24 19:55:45: AMT manometer pressure, DC bias Message-ID: Manometer pressure error msg happens once every pumpdown. Simply restarting the process has been successful so far. Others reported DC bias errors using oxide etch process 3. I'm using proc 1. From cbaxter at snf.stanford.edu Wed Aug 24 21:38:05 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 24 Aug 2005 21:38:05 -0700 Subject: Problem amtetcher SNF 2005-08-24 19:55:45: AMT manometer pressure, DC bias Message-ID: zeroed manometer. From vigneshg at snf.stanford.edu Fri Aug 26 11:35:28 2005 From: vigneshg at snf.stanford.edu (vigneshg at snf.stanford.edu) Date: Fri, 26 Aug 2005 11:35:28 -0700 Subject: Shutdown amtetcher SNF 2005-08-26 11:35:27: heat exchanger off Message-ID: Not able to run any processes. Not able to put it on standby... it is vented at the moment. Needs urgent attention. From vigneshg at snf.stanford.edu Fri Aug 26 12:50:30 2005 From: vigneshg at snf.stanford.edu (vigneshg at snf.stanford.edu) Date: Fri, 26 Aug 2005 12:50:30 -0700 Subject: Problem amtetcher SNF 2005-08-26 12:50:30: postrscript to previous msg... Message-ID: the user before me had not left the machine as it was supposed to have been... I don't know if that had anything to do with the pproblem of the heat exchanger. From vigneshg at snf.stanford.edu Fri Aug 26 12:51:39 2005 From: vigneshg at snf.stanford.edu (vigneshg at snf.stanford.edu) Date: Fri, 26 Aug 2005 12:51:39 -0700 Subject: Problem amtetcher SNF 2005-08-26 12:51:38: Hexode not moving smoothly Message-ID: The hexode got stuck midway. It was easy to fix. I just silenced the alarm and made it move again. From eenriquez at snf.stanford.edu Fri Aug 26 16:16:18 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Aug 2005 16:16:18 -0700 Subject: Problem amtetcher SNF 2005-08-26 12:51:38: Hexode not moving smoothly Message-ID: Cycled hexode. No problem From eenriquez at snf.stanford.edu Fri Aug 26 16:17:33 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Aug 2005 16:17:33 -0700 Subject: Problem amtetcher SNF 2005-08-26 12:50:30: postrscript to previous msg... Message-ID: ok From eenriquez at snf.stanford.edu Fri Aug 26 16:17:34 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Aug 2005 16:17:34 -0700 Subject: Problem amtetcher SNF 2005-08-26 12:50:30: postrscript to previous msg... Message-ID: ok From eenriquez at snf.stanford.edu Fri Aug 26 16:17:38 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Aug 2005 16:17:38 -0700 Subject: Shutdown amtetcher SNF 2005-08-26 11:35:27: heat exchanger off Message-ID: Reset the system and purged out air from water line.