Shutdown amtetcher SNF 2005-08-11 10:50:59: alarm- turbo off

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Aug 11 16:27:14 PDT 2005


Restarted the turbo.  Ran several etch cycles with no problem. Also noticed that the Pquest turbo was also off.  Perhaps its just a coincidence.




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