Problem amtetcher SNF 2005-08-23 16:08:46: low DC bias

sanli at snf.stanford.edu sanli at snf.stanford.edu
Tue Aug 23 16:08:47 PDT 2005


I keeps giving this error message and shuts off the flow and theRF every few minutes. I made sure that all the trays are appropriately in position, but didn't make a difference. I did 10 min. seasoning before my etch without any incidence like this. I also observed minor arcing on tray 2.




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