Problem amtetcher SNF 2005-08-24 19:55:45: AMT manometer pressure, DC bias

king at snf.stanford.edu king at snf.stanford.edu
Wed Aug 24 19:55:46 PDT 2005


Manometer pressure error msg happens once every pumpdown.  Simply restarting the process has been successful so far.  Others reported DC bias errors using oxide etch process 3. I'm using proc 1.




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