From sanli at snf.stanford.edu  Thu Dec  8 17:54:27 2005
From: sanli at snf.stanford.edu (sanli at snf.stanford.edu)
Date: Thu, 8 Dec 2005 17:54:27 -0800
Subject: Problem amtetcher SNF 2005-12-08 17:54:26: program 2 not programmed
Message-ID: <mailman.968.1357938223.25670.amtetcher-pcs@snf.stanford.edu>

There is no program 2. I ran program 3 for 2 minutes instead, so that at least it does not stay vented.



From eenriquez at snf.stanford.edu  Fri Dec  9 10:36:32 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 9 Dec 2005 10:36:32 -0800
Subject: Problem amtetcher SNF 2005-12-08 17:54:26: program 2 not programmed
Message-ID: <mailman.969.1357938223.25670.amtetcher-pcs@snf.stanford.edu>

Reprogrammed  recipe #2.



From yue at snf.stanford.edu  Thu Dec 15 09:08:20 2005
From: yue at snf.stanford.edu (yue at snf.stanford.edu)
Date: Thu, 15 Dec 2005 09:08:20 -0800
Subject: Problem amtetcher SNF 2005-12-15 09:08:19: manometer
Message-ID: <mailman.970.1357938223.25670.amtetcher-pcs@snf.stanford.edu>

manometer failed during seasoning and real etch. pressed run again and it went fine.