From mislam at snf.stanford.edu Sat Jul 2 09:48:19 2005 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sat, 2 Jul 2005 09:48:19 -0700 Subject: Problem amtetcher SNF 2005-07-02 09:48:18: Glass window very cloudy Message-ID: Cann't see wafer in the chamber From cbaxter at snf.stanford.edu Sat Jul 2 13:55:41 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 2 Jul 2005 13:55:41 -0700 Subject: Problem amtetcher SNF 2005-07-02 09:48:18: Glass window very cloudy Message-ID: cleaned widnow, will order new view window. From cbaxter at snf.stanford.edu Tue Jul 5 20:08:56 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 5 Jul 2005 20:08:56 -0700 Subject: Shutdown amtetcher SNF 2005-07-05 20:08:55: need to change view port window Message-ID: From cbaxter at snf.stanford.edu Tue Jul 5 21:57:42 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 5 Jul 2005 21:57:42 -0700 Subject: Shutdown amtetcher SNF 2005-07-05 20:08:55: need to change view port window Message-ID: changed inner and outter viewport window. From grupp at snf.stanford.edu Thu Jul 7 19:45:52 2005 From: grupp at snf.stanford.edu (grupp at snf.stanford.edu) Date: Thu, 7 Jul 2005 19:45:52 -0700 Subject: Problem amtetcher SNF 2005-07-07 19:45:51: slow turbo Message-ID: fails to pump to base. run again, and it makes it. concerned sometings wrong. why don't we use the cryo? is it dead? thanks, dan please rsvp to grupp at snf From cbaxter at snf.stanford.edu Thu Jul 7 20:31:17 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 7 Jul 2005 20:31:17 -0700 Subject: Problem amtetcher SNF 2005-07-07 19:45:51: slow turbo Message-ID: vacuum pump was low on fomblin oil, added 11/2kg of 14/6 fomblin oil. From joshuar at snf.stanford.edu Fri Jul 8 09:17:12 2005 From: joshuar at snf.stanford.edu (joshuar at snf.stanford.edu) Date: Fri, 8 Jul 2005 09:17:12 -0700 Subject: Comment amtetcher SNF 2005-07-08 09:17:12: amt free from 11 am to 1 pm Message-ID: From sourav at snf.stanford.edu Fri Jul 8 13:17:55 2005 From: sourav at snf.stanford.edu (sourav at snf.stanford.edu) Date: Fri, 8 Jul 2005 13:17:55 -0700 Subject: Shutdown amtetcher SNF 2005-07-08 13:17:54: Chamber Pressure Message-ID: Chamber Pressure doesn't go down to Base Press. Shows error message "Ion Gauge Failed" during turbo pump down step of process 2. From eenriquez at snf.stanford.edu Fri Jul 8 16:19:50 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 8 Jul 2005 16:19:50 -0700 Subject: Shutdown amtetcher SNF 2005-07-08 13:17:54: Chamber Pressure Message-ID: Heated the gauge with a heat gun to degas it. Zeroed cap manometer. Ran a test with no problems. From joshuar at snf.stanford.edu Sat Jul 9 09:04:57 2005 From: joshuar at snf.stanford.edu (joshuar at snf.stanford.edu) Date: Sat, 9 Jul 2005 09:04:57 -0700 Subject: Problem amtetcher SNF 2005-07-09 09:04:56: ion gauge failure Message-ID: cannot pump to base pressure From cbaxter at snf.stanford.edu Mon Jul 11 22:15:18 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 11 Jul 2005 22:15:18 -0700 Subject: Problem amtetcher SNF 2005-07-09 09:04:56: ion gauge failure Message-ID: tighten ion gauge compression fitting and also holding step on recipe#2. From eenriquez at snf.stanford.edu Tue Jul 12 12:16:45 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 12 Jul 2005 12:16:45 -0700 Subject: Shutdown amtetcher SNF 2005-07-12 12:16:45: Turbo keeps shutdown Message-ID: From eenriquez at snf.stanford.edu Tue Jul 12 16:44:13 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 12 Jul 2005 16:44:13 -0700 Subject: Shutdown amtetcher SNF 2005-07-12 12:16:45: Turbo keeps shutdown Message-ID: Drained oil from pump exhaust line. Ran recipe #3 for 5 cycles (vent chamber and run process) with no turbo problem. Still has an ion gauge failure alarm. A work around this problem is to clear the alarm and press run again. Do this until the ion gauge reading gets below the setpoint. The longer the chamber is open to atmosphere, the longer it will take to pump down below the setpoint. From eenriquez at snf.stanford.edu Tue Jul 12 16:46:55 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 12 Jul 2005 16:46:55 -0700 Subject: Problem amtetcher SNF 2005-07-12 16:46:54: Ion gauge failrure Message-ID: System still faults for ion gauge failure. Might need rebuilt the ion gauge isolation valve. From cbaxter at snf.stanford.edu Tue Jul 12 17:48:53 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 12 Jul 2005 17:48:53 -0700 Subject: Problem amtetcher SNF 2005-07-12 16:46:54: Ion gauge failrure Message-ID: From king at snf.stanford.edu Wed Jul 13 10:39:39 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 13 Jul 2005 10:39:39 -0700 Subject: Problem amtetcher SNF 2005-07-13 10:39:37: TURBO PUMP WENT OFF Message-ID: A quote from the AMT screen. From jhpark9 at snf.stanford.edu Wed Jul 13 14:00:34 2005 From: jhpark9 at snf.stanford.edu (jhpark9 at snf.stanford.edu) Date: Wed, 13 Jul 2005 14:00:34 -0700 Subject: Problem amtetcher SNF 2005-07-13 14:00:33: Ion gauge failed... Message-ID: As showing the message "Ion gauge failed", it doesn't work. From cbaxter at snf.stanford.edu Wed Jul 13 16:47:49 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 13 Jul 2005 16:47:49 -0700 Subject: Shutdown amtetcher SNF 2005-07-13 16:47:48: ion gauge error. Message-ID: From cbaxter at snf.stanford.edu Wed Jul 13 21:53:30 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 13 Jul 2005 21:53:30 -0700 Subject: Shutdown amtetcher SNF 2005-07-13 16:47:48: ion gauge error. Message-ID: ion gauge was bad, the degas filament is burned. changed ion gauge(found a spare on cabinet). also, removed gate valve that isolate the ion gauge and cleaned with ipa. changed the fomblin oil on turbo pump. From cbaxter at snf.stanford.edu Wed Jul 13 21:53:54 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 13 Jul 2005 21:53:54 -0700 Subject: Problem amtetcher SNF 2005-07-13 14:00:33: Ion gauge failed... Message-ID: changed ion gauge. From cbaxter at snf.stanford.edu Wed Jul 13 21:54:00 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 13 Jul 2005 21:54:00 -0700 Subject: Problem amtetcher SNF 2005-07-13 10:39:37: TURBO PUMP WENT OFF Message-ID: From latta at snf.stanford.edu Wed Jul 20 09:31:20 2005 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 20 Jul 2005 09:31:20 -0700 Subject: Problem amtetcher SNF 2005-07-20 09:31:20: turbo off error Message-ID: Ed was walking by and heard a system alarm.... From eenriquez at snf.stanford.edu Wed Jul 20 10:26:45 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Jul 2005 10:26:45 -0700 Subject: Shutdown amtetcher SNF 2005-07-20 10:26:40: Bad turbo pump Message-ID: From eenriquez at snf.stanford.edu Wed Jul 20 16:02:03 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Jul 2005 16:02:03 -0700 Subject: Shutdown amtetcher SNF 2005-07-20 10:26:40: Bad turbo pump Message-ID: Replaced turbo controller. From eenriquez at snf.stanford.edu Wed Jul 20 16:05:35 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 20 Jul 2005 16:05:35 -0700 Subject: Problem amtetcher SNF 2005-07-20 09:31:20: turbo off error Message-ID: Replaced turbo controller From sourav at snf.stanford.edu Fri Jul 22 17:16:01 2005 From: sourav at snf.stanford.edu (sourav at snf.stanford.edu) Date: Fri, 22 Jul 2005 17:16:01 -0700 Subject: Problem amtetcher SNF 2005-07-22 17:16:01: Can't reach process pressure (40 mTorr) Message-ID: get stuck at ~ 70-80 mTorr pressure at the WAIT PR step for process 3. From cbaxter at snf.stanford.edu Fri Jul 22 21:51:15 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 22 Jul 2005 21:51:15 -0700 Subject: Problem amtetcher SNF 2005-07-22 17:16:01: Can't reach process pressure (40 mTorr) Message-ID: turbo controller won't spin up turbo pump. changed turbo controller. From levi at snf.stanford.edu Mon Jul 25 17:24:46 2005 From: levi at snf.stanford.edu (levi at snf.stanford.edu) Date: Mon, 25 Jul 2005 17:24:46 -0700 Subject: Problem amtetcher SNF 2005-07-25 17:24:45: monometer error during etch Message-ID: AMT techer front panel showed "monometer error" during etch session. Earlier Elmer tested the system and saw no problems. Etch pressure fluctuated more then normal and took 2 minutes instead of 0.5 minute of etch duration to stabilize at -390 V and 40 mtorr pressure. When running the same process again, the error did not apear but the pressure and voltage instability during the first two minutes remained. Ofer From cbaxter at snf.stanford.edu Mon Jul 25 19:31:12 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 25 Jul 2005 19:31:12 -0700 Subject: Problem amtetcher SNF 2005-07-25 17:24:45: monometer error during etch Message-ID: system loas comunication. had to reset system. i ran recipe#2 & 3 without a problem. From king at snf.stanford.edu Tue Jul 26 10:04:10 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 26 Jul 2005 10:04:10 -0700 Subject: Problem amtetcher SNF 2005-07-26 10:04:10: AMT manometer pressure Message-ID: Error msg during pumpdowns. Works the second time. From eenriquez at snf.stanford.edu Tue Jul 26 14:58:20 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 26 Jul 2005 14:58:20 -0700 Subject: Problem amtetcher SNF 2005-07-26 10:04:10: AMT manometer pressure Message-ID: Zeroed manometer. Cycled system 4 times with no problems. From okilic at snf.stanford.edu Fri Jul 29 17:46:30 2005 From: okilic at snf.stanford.edu (okilic at snf.stanford.edu) Date: Fri, 29 Jul 2005 17:46:30 -0700 Subject: Problem amtetcher SNF 2005-07-29 17:46:27: piece lost Message-ID: A piece 6mmx6mm fell off of wafer with an STS through etch bonded with resist on a handle wafer. Happened at the beginning of etch, aborted etch, but couldn't find any piece in the chamber. I am concerned that the piece might affect/damage the pumps. From cbaxter at snf.stanford.edu Fri Jul 29 19:29:20 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 29 Jul 2005 19:29:20 -0700 Subject: Problem amtetcher SNF 2005-07-29 17:46:27: piece lost Message-ID: vented chamber, could not find sample pieces of wafer that was lose.