From fengj at snf.stanford.edu Fri Jun 3 10:56:11 2005 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Fri, 3 Jun 2005 10:56:11 -0700 Subject: Problem amtetcher SNF 2005-06-03 10:56:10: lots of particles Message-ID: Inside the chamber, and some on the wafers can even be eye-balled. From eenriquez at snf.stanford.edu Fri Jun 3 14:28:18 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 3 Jun 2005 14:28:18 -0700 Subject: Problem amtetcher SNF 2005-06-03 10:56:10: lots of particles Message-ID: Found the Standby (#2)recipe had been changed again. Wiped down the chamber and re-entered Standby recipe parameters. From skoh at snf.stanford.edu Tue Jun 14 17:38:17 2005 From: skoh at snf.stanford.edu (skoh at snf.stanford.edu) Date: Tue, 14 Jun 2005 17:38:17 -0700 Subject: Problem amtetcher SNF 2005-06-14 17:38:16: vacuum wand quartz tip broke Message-ID: From cbaxter at snf.stanford.edu Tue Jun 14 17:50:07 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 14 Jun 2005 17:50:07 -0700 Subject: Problem amtetcher SNF 2005-06-14 17:38:16: vacuum wand quartz tip broke Message-ID: changed vacuum wand From lwchang at snf.stanford.edu Wed Jun 22 12:12:33 2005 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Wed, 22 Jun 2005 12:12:33 -0700 Subject: Problem amtetcher SNF 2005-06-22 12:12:32: Process 2 RF out of limit Message-ID: From eenriquez at snf.stanford.edu Wed Jun 22 13:16:58 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Jun 2005 13:16:58 -0700 Subject: Problem amtetcher SNF 2005-06-22 12:12:32: Process 2 RF out of limit Message-ID: Tuned rf generator and resumed process.