From yetao at snf.stanford.edu Fri May 13 11:08:45 2005 From: yetao at snf.stanford.edu (yetao at snf.stanford.edu) Date: Fri, 13 May 2005 11:08:45 -0700 Subject: Problem amtetcher SNF 2005-05-13 11:08:45: view port blurry, can't see anything in the chamber Message-ID: From eenriquez at snf.stanford.edu Mon May 16 12:10:33 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 May 2005 12:10:33 -0700 Subject: Problem amtetcher SNF 2005-05-13 11:08:45: view port blurry, can't see anything in the chamber Message-ID: Cleaned dirty view port. Found that someone had changed recipe 2 back to the old recipe. This eliminated the post process chamber clean which resulted in dirty chamber and view port. Reprogrammed recipe 2. From king at snf.stanford.edu Thu May 19 22:29:32 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 19 May 2005 22:29:32 -0700 Subject: Problem amtetcher SNF 2005-05-19 22:29:31: Particles in the AMT Message-ID: Lots of particles. Also, the jog would often not rotate the wafers fully but it worked if 'jog' was pressed again. From eenriquez at snf.stanford.edu Fri May 20 10:25:13 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 20 May 2005 10:25:13 -0700 Subject: Problem amtetcher SNF 2005-05-19 22:29:31: Particles in the AMT Message-ID: Cleaned chamber.