Problem amtetcher SNF 2005-05-13 11:08:45: view port blurry, can't see anything in the chamber
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon May 16 12:10:33 PDT 2005
Cleaned dirty view port. Found that someone had changed recipe 2 back to the old recipe. This eliminated the post process chamber clean which resulted in dirty chamber and view port. Reprogrammed recipe 2.
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