Problem amtetcher SNF 2005-05-13 11:08:45: view port blurry, can't see anything in the chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon May 16 12:10:33 PDT 2005


Cleaned dirty view port.  Found that someone had changed recipe 2 back to the old recipe.  This eliminated the post process chamber clean which resulted in dirty chamber and view port.  Reprogrammed recipe 2.




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