From true at snf.stanford.edu Sun Oct 2 17:09:00 2005 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: Sun, 2 Oct 2005 17:09:00 -0700 Subject: Problem amtetcher SNF 2005-10-02 17:08:59: safety hazard - clamp not working properly Message-ID: the clamp that comes down and pushes in the fingers is flakey. most of the time I have to push it down while holding in the red buttons - I've got to get my etches done but don't want to loose a finger. From true at snf.stanford.edu Mon Oct 3 03:16:58 2005 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: Mon, 3 Oct 2005 03:16:58 -0700 Subject: Problem amtetcher SNF 2005-10-03 03:16:58: manometer (?) failure Message-ID: happens about every other time, I hit ABORT then START again From eenriquez at snf.stanford.edu Mon Oct 3 15:16:38 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 3 Oct 2005 15:16:38 -0700 Subject: Problem amtetcher SNF 2005-10-02 17:08:59: safety hazard - clamp not working properly Message-ID: Pneumatic air pressure was slightly low. Increased air pressure from 40 to 50 psi. From eenriquez at snf.stanford.edu Mon Oct 3 15:26:11 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 3 Oct 2005 15:26:11 -0700 Subject: Problem amtetcher SNF 2005-10-03 03:16:58: manometer (?) failure Message-ID: The system actually fails for an erratic chamber TC reading. Replaced the TC tube. System only fails when the chamber is left open for an extended period of time. When the error occurs, just silence the alarm and press run. From amin at snf.stanford.edu Wed Oct 5 21:14:56 2005 From: amin at snf.stanford.edu (amin at snf.stanford.edu) Date: Wed, 5 Oct 2005 21:14:56 -0700 Subject: Problem amtetcher SNF 2005-10-05 21:14:55: Arcing on the latch of tray #6 Message-ID: From cbaxter at snf.stanford.edu Wed Oct 5 22:01:35 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 5 Oct 2005 22:01:35 -0700 Subject: Problem amtetcher SNF 2005-10-05 21:14:55: Arcing on the latch of tray #6 Message-ID: cleaned arcing on tray#6 and condition chamber. From bchui at snf.stanford.edu Thu Oct 6 03:33:55 2005 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Thu, 6 Oct 2005 03:33:55 -0700 Subject: Problem amtetcher SNF 2005-10-06 03:33:53: Broken dummy wafer Message-ID: when i arrived at the machine, i found one dummy wafer broken sitting on the side, and the previous user had apparently replaced it with the monitor wafer. after I had used the machine and was replacing the dummy wafers, one more broke, and i had no wafers of my own to replace that one with. So I placed the largest fragment back on the tray (top slot, tray#6) and started the idle pump program #2 as usual. From eenriquez at snf.stanford.edu Thu Oct 6 09:39:10 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 6 Oct 2005 09:39:10 -0700 Subject: Problem amtetcher SNF 2005-10-06 03:33:53: Broken dummy wafer Message-ID: Replaced all dummy wafers. From ginel at snf.stanford.edu Fri Oct 7 11:57:52 2005 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Fri, 7 Oct 2005 11:57:52 -0700 Subject: Problem amtetcher SNF 2005-10-07 11:57:51: manometer failed error during pumpdown Message-ID: i From cbaxter at snf.stanford.edu Mon Oct 10 16:20:21 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 10 Oct 2005 16:20:21 -0700 Subject: Problem amtetcher SNF 2005-10-07 11:57:51: manometer failed error during pumpdown Message-ID: tighten monometer fitting. From cbaxter at snf.stanford.edu Fri Oct 21 14:47:37 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 21 Oct 2005 14:47:37 -0700 Subject: Shutdown amtetcher SNF 2005-10-21 14:47:36: water leak on heat exchanger Message-ID: From cbaxter at snf.stanford.edu Fri Oct 21 15:38:48 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 21 Oct 2005 15:38:48 -0700 Subject: Shutdown amtetcher SNF 2005-10-21 14:47:36: water leak on heat exchanger Message-ID: Elmer and I repaired water leak on heat exchanger. From seoung at snf.stanford.edu Wed Oct 26 12:51:35 2005 From: seoung at snf.stanford.edu (seoung at snf.stanford.edu) Date: Wed, 26 Oct 2005 12:51:35 -0700 Subject: Problem amtetcher SNF 2005-10-26 12:51:34: Leak problem Message-ID: When the machine started pumping, it gave an error. "Manometer leak". Then it stopped. I aborted my process and restarted. Looks fine in the second run. From jhaydon at snf.stanford.edu Wed Oct 26 16:17:59 2005 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 26 Oct 2005 16:17:59 -0700 Subject: Problem amtetcher SNF 2005-10-26 12:51:34: Leak problem Message-ID: can/t duplicate error From fengj at snf.stanford.edu Thu Oct 27 19:21:18 2005 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Thu, 27 Oct 2005 19:21:18 -0700 Subject: Problem amtetcher SNF 2005-10-27 19:21:17: Vacuum wand does not work Message-ID: From cbaxter at snf.stanford.edu Thu Oct 27 19:39:50 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 27 Oct 2005 19:39:50 -0700 Subject: Problem amtetcher SNF 2005-10-27 19:21:17: Vacuum wand does not work Message-ID: installed new vacuum wand From king at snf.stanford.edu Mon Oct 31 14:39:55 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 31 Oct 2005 14:39:55 -0800 Subject: Problem amtetcher SNF 2005-10-31 14:39:54: AMT manometer failure after each venting. Message-ID: From cbaxter at snf.stanford.edu Mon Oct 31 18:01:56 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 31 Oct 2005 18:01:56 -0800 Subject: Problem amtetcher SNF 2005-10-31 14:39:54: AMT manometer failure after each venting. Message-ID: reseated baratron connector