Shutdown amtetcher SNF 2006-12-06 13:22:50: Ion gage is not working

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Dec 6 16:07:15 PST 2006


Removed a wafer from the chamber o-ring.  Replaced tray #6 ardel shield and clips.  Ran test with no problems.




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