Comment amtetcher SNF 2006-12-11 13:59:26: Clips are very worn, dummy wafers are falling out

iwygant at snf.stanford.edu iwygant at snf.stanford.edu
Mon Dec 11 13:59:26 PST 2006


Some of the clips are so worn down, that it's very difficult to prevent the dummy wafers from falling out during the etch.  A dummy wafer fell out for the previous user and fell out for me too.




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