From cbaxter at snf.stanford.edu Wed Feb 1 13:04:29 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 1 Feb 2006 13:04:29 -0800 Subject: Comment amtetcher SNF 2006-02-01 13:03:48: test Message-ID: test From elvislin at snf.stanford.edu Sun Feb 5 17:23:12 2006 From: elvislin at snf.stanford.edu (elvislin at snf.stanford.edu) Date: Sun, 5 Feb 2006 17:23:12 -0800 Subject: Problem amtetcher SNF 2006-02-05 17:23:11: heat exchanger off and turbo went off message Message-ID: From cbaxter at snf.stanford.edu Mon Feb 6 11:01:25 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 6 Feb 2006 11:01:25 -0800 Subject: Problem amtetcher SNF 2006-02-05 17:23:11: heat exchanger off and turbo went off message Message-ID: ramp up turbo pump and reset heat exchanger. From cbaxter at snf.stanford.edu Mon Feb 6 11:01:35 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 6 Feb 2006 11:01:35 -0800 Subject: Comment amtetcher SNF 2006-02-01 13:03:48: test Message-ID: From latta at snf.stanford.edu Thu Feb 9 11:16:16 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 9 Feb 2006 11:16:16 -0800 Subject: Problem amtetcher SNF 2006-02-09 11:16:15: keep getting the manometer leak error Message-ID: Tried to continue to run 4 times..... From cbaxter at snf.stanford.edu Thu Feb 9 11:32:55 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 9 Feb 2006 11:32:55 -0800 Subject: Problem amtetcher SNF 2006-02-09 11:16:15: keep getting the manometer leak error Message-ID: reseated connector cable on baratron and cycled tool a couple of time. From ee410a at snf.stanford.edu Tue Feb 14 10:44:12 2006 From: ee410a at snf.stanford.edu (ee410a at snf.stanford.edu) Date: Tue, 14 Feb 2006 10:44:12 -0800 Subject: Comment amtetcher SNF 2006-02-14 10:44:11: Message-ID: 2nd wafer holder from top (first column) has problems with the clips. Also "nanometer leak" error message. From tura at snf.stanford.edu Sat Feb 18 14:05:01 2006 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Sat, 18 Feb 2006 14:05:01 -0800 Subject: Problem amtetcher SNF 2006-02-18 14:05:01: machine shut itself down Message-ID: i unloaded my wafer, pressed "Bell Down", and everything went black. tried the green "power on" button, but it doesn't work. somebody who knows how to turn it on, please take a look. From jinyao at snf.stanford.edu Sat Feb 18 14:52:18 2006 From: jinyao at snf.stanford.edu (jinyao at snf.stanford.edu) Date: Sat, 18 Feb 2006 14:52:18 -0800 Subject: Shutdown amtetcher SNF 2006-02-18 14:52:18: chamber wide open Message-ID: From cbaxter at snf.stanford.edu Mon Feb 20 20:25:51 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 20 Feb 2006 20:25:51 -0800 Subject: Shutdown amtetcher SNF 2006-02-18 14:52:18: chamber wide open Message-ID: the hoist breaker tripped and shutdown the power to the tool. reset system breaker and re-primed cold and hot pumps, exceerised hoist up/down without a problem. From cbaxter at snf.stanford.edu Mon Feb 20 20:25:53 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 20 Feb 2006 20:25:53 -0800 Subject: Shutdown amtetcher SNF 2006-02-18 14:52:18: chamber wide open Message-ID: the hoist breaker tripped and shutdown the power to the tool. reset system breaker and re-primed cold and hot pumps, exceerised hoist up/down without a problem. From cbaxter at snf.stanford.edu Mon Feb 20 20:25:54 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 20 Feb 2006 20:25:54 -0800 Subject: Problem amtetcher SNF 2006-02-18 14:05:01: machine shut itself down Message-ID: From cbaxter at snf.stanford.edu Mon Feb 20 20:25:56 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 20 Feb 2006 20:25:56 -0800 Subject: Comment amtetcher SNF 2006-02-14 10:44:11: Message-ID: From tag at snf.stanford.edu Wed Feb 22 01:21:27 2006 From: tag at snf.stanford.edu (tag at snf.stanford.edu) Date: Wed, 22 Feb 2006 01:21:27 -0800 Subject: Problem amtetcher SNF 2006-02-22 01:21:27: Turbo Overloaded Message-ID: "turbo overloaded" message is coming out in Process2. From eenriquez at snf.stanford.edu Wed Feb 22 19:51:28 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Feb 2006 19:51:28 -0800 Subject: Problem amtetcher SNF 2006-02-22 01:21:27: Turbo Overloaded Message-ID: Reset turbo. From sanli at snf.stanford.edu Thu Feb 23 16:53:11 2006 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: Thu, 23 Feb 2006 16:53:11 -0800 Subject: Problem amtetcher SNF 2006-02-23 16:53:11: Turbo overload Message-ID: I did a long oxide etch (80 min). I gave this error message once but it let me continue. However, it started giving this error message while running the standby program. From bchui at snf.stanford.edu Thu Feb 23 19:58:01 2006 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Thu, 23 Feb 2006 19:58:01 -0800 Subject: Problem amtetcher SNF 2006-02-23 19:58:00: display garbled Message-ID: The alphanumeric display starts to show garbled text as time goes on. Pressing any status button to refresh it does restore the text for a few minutes. (Etch itself works fine.) From eenriquez at snf.stanford.edu Thu Feb 23 21:50:29 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Feb 2006 21:50:29 -0800 Subject: Problem amtetcher SNF 2006-02-23 19:58:00: display garbled Message-ID: 5 volt power supply was at 4.6 VDC. Adjusted supply voltage to 5.1 V From eenriquez at snf.stanford.edu Thu Feb 23 21:50:39 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Feb 2006 21:50:39 -0800 Subject: Problem amtetcher SNF 2006-02-23 16:53:11: Turbo overload Message-ID: 5 volt power supply was at 4.6 VDC. Adjusted supply voltage to 5.1 V From jinyao at snf.stanford.edu Sat Feb 25 00:00:20 2006 From: jinyao at snf.stanford.edu (jinyao at snf.stanford.edu) Date: Sat, 25 Feb 2006 00:00:20 -0800 Subject: Problem amtetcher SNF 2006-02-25 00:00:19: showing RF out of limits Message-ID: From tag at snf.stanford.edu Sat Feb 25 01:56:47 2006 From: tag at snf.stanford.edu (tag at snf.stanford.edu) Date: Sat, 25 Feb 2006 01:56:47 -0800 Subject: Problem amtetcher SNF 2006-02-25 01:56:46: "RF out of limits " in process2 Message-ID: Sometimes "RF out of limits" and "Turbo overloaded" error comes out in process2. I used Process4 and there is NO problem. Also indicator shows garbled text in Process2. (During Process4, it was OK). From eenriquez at snf.stanford.edu Sun Feb 26 09:56:58 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 26 Feb 2006 09:56:58 -0800 Subject: Problem amtetcher SNF 2006-02-25 01:56:46: "RF out of limits " in process2 Message-ID: Seems to be a problem only with recipe 2, the standby recipe. Modified the recipe to enable to run. Will continue to troubleshoot From eenriquez at snf.stanford.edu Sun Feb 26 09:57:08 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 26 Feb 2006 09:57:08 -0800 Subject: Problem amtetcher SNF 2006-02-25 00:00:19: showing RF out of limits Message-ID: Seems to be a problem only with recipe 2, the standby recipe. Modified the recipe to enable to run. Will continue to troubleshoot From tura at snf.stanford.edu Sun Feb 26 12:30:20 2006 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Sun, 26 Feb 2006 12:30:20 -0800 Subject: Problem amtetcher SNF 2006-02-26 12:30:19: "turbo overloaded" Message-ID: I use recipe 7, and it gives "turbo overloaded" error and stops etching every ~30 seconds. Also the display shows random characters. It is really annoying. It was not like this, clearly something is wrong. From cbaxter at snf.stanford.edu Mon Feb 27 08:16:38 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 27 Feb 2006 08:16:38 -0800 Subject: Problem amtetcher SNF 2006-02-26 12:30:19: "turbo overloaded" Message-ID: reset turbo controller From peichen at snf.stanford.edu Mon Feb 27 16:26:02 2006 From: peichen at snf.stanford.edu (peichen at snf.stanford.edu) Date: Mon, 27 Feb 2006 16:26:02 -0800 Subject: Problem amtetcher SNF 2006-02-27 16:26:01: Heat Exchanger Off Message-ID: From eenriquez at snf.stanford.edu Mon Feb 27 21:25:18 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 27 Feb 2006 21:25:18 -0800 Subject: Problem amtetcher SNF 2006-02-27 16:26:01: Heat Exchanger Off Message-ID: Restarted chiller