Problem amtetcher SNF 2006-02-23 16:53:11: Turbo overload

sanli at snf.stanford.edu sanli at snf.stanford.edu
Thu Feb 23 16:53:11 PST 2006


I did a long oxide etch (80 min). I gave this error message once
but it let me continue. However, it started giving this error
message while running the standby program. 




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