Problem amtetcher SNF 2006-01-07 19:16:23: Process2 Error

tag at snf.stanford.edu tag at snf.stanford.edu
Sat Jan 7 19:16:24 PST 2006


After "2 ETCH" of Process 2, "ERR FL5 WAIT PR, FLOW 5 OUT LIMIT" message comes out. The flow level is 15 / 25 cc. It doesn't work well.




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