Problem amtetcher SNF 2006-01-08 18:53:51: Flow 5 out limit.
tag at snf.stanford.edu
tag at snf.stanford.edu
Sun Jan 8 18:53:52 PST 2006
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Problem amtetcher SNF 2006-01-08 18:35:26: Compressed Air actuated wafer tray doesn't work.
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Problem amtetcher SNF 2006-01-08 18:53:51: Flow 5 out limit.
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ERR FL5 message again. Flow 5 out limit in Process 2.
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Problem amtetcher SNF 2006-01-08 18:35:26: Compressed Air actuated wafer tray doesn't work.
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Problem amtetcher SNF 2006-01-08 18:53:51: Flow 5 out limit.
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