From ericp at snf.stanford.edu Fri Jun 2 03:22:58 2006 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Fri, 2 Jun 2006 03:22:58 -0700 Subject: Comment amtetcher SNF 2006-06-02 03:22:58: Hot loop only at 26C Message-ID: The Hot loop is running a little cold. From dansanga at snf.stanford.edu Fri Jun 2 20:01:47 2006 From: dansanga at snf.stanford.edu (dansanga at snf.stanford.edu) Date: Fri, 2 Jun 2006 20:01:47 -0700 Subject: Problem amtetcher SNF 2006-06-02 20:01:46: amt etcher - reports low dc bias and plasma shuts down after 1 min into etch cycle Message-ID: dummy conditioning ran fine for 15 minutes with program 3. first pass run stopped at 12 miln 55 seconds s- plasma stopped. reported low dc bias. tried from begining second pass after aborting first pass and repeating the process. same problem again. something wrong with dc bias. called ceasar baxter and left message for him. dan From dansanga at snf.stanford.edu Fri Jun 2 20:22:50 2006 From: dansanga at snf.stanford.edu (dansanga at snf.stanford.edu) Date: Fri, 2 Jun 2006 20:22:50 -0700 Subject: Problem amtetcher SNF 2006-06-02 20:22:49: amt etcher repeats low dc bias problem Message-ID: trlied third time and exactly with 12' 55" remaining of 14 min cycycle the plasma shuts down and the machine error message reads low dc bias. From bchui at snf.stanford.edu Sat Jun 3 02:45:37 2006 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sat, 3 Jun 2006 02:45:37 -0700 Subject: Comment amtetcher SNF 2006-06-03 02:45:36: Previous user left chamber vented Message-ID: Please remember to run program 2 after you're done. From king at snf.stanford.edu Sat Jun 3 19:50:17 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Sat, 3 Jun 2006 19:50:17 -0700 Subject: Problem amtetcher SNF 2006-06-03 19:50:16: AMT-- DC Bias Message-ID: won't reach standard setpoint of -530V for program 3. Kills the power. From king at snf.stanford.edu Sun Jun 4 00:52:10 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Sun, 4 Jun 2006 00:52:10 -0700 Subject: Problem amtetcher SNF 2006-06-04 00:52:09: Note AMT Pgm #3 etch rate Message-ID: In order to sustain a plasma the DC Bias was programmed for -475V instead of -530V. If you run Pgm #3 at -475V please note that the etch rate of thermal oxide drops to about 254A/ min, about 110A/min lower than normal. From cbaxter at snf.stanford.edu Mon Jun 5 08:05:34 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 5 Jun 2006 08:05:34 -0700 Subject: Problem amtetcher SNF 2006-06-02 20:01:46: amt etcher - reports low dc bias and plasma shuts down after 1 min into etch cycle Message-ID: From cbaxter at snf.stanford.edu Mon Jun 5 09:34:07 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 5 Jun 2006 09:34:07 -0700 Subject: Problem amtetcher SNF 2006-06-04 00:52:09: Note AMT Pgm #3 etch rate Message-ID: From cbaxter at snf.stanford.edu Mon Jun 5 09:34:22 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 5 Jun 2006 09:34:22 -0700 Subject: Problem amtetcher SNF 2006-06-03 19:50:16: AMT-- DC Bias Message-ID: cleaned rf coil. From cbaxter at snf.stanford.edu Mon Jun 5 09:34:30 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 5 Jun 2006 09:34:30 -0700 Subject: Problem amtetcher SNF 2006-06-02 20:22:49: amt etcher repeats low dc bias problem Message-ID: From riteshj at snf.stanford.edu Mon Jun 5 11:25:49 2006 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Mon, 5 Jun 2006 11:25:49 -0700 Subject: Problem amtetcher SNF 2006-06-05 11:25:48: DC bias goes to only -475V Message-ID: DC bias doesnt go all the way to -530V which has changed the etch rate. Would like it back to the original condition (-530V) From cbaxter at snf.stanford.edu Mon Jun 5 12:18:47 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 5 Jun 2006 12:18:47 -0700 Subject: Problem amtetcher SNF 2006-06-05 11:25:48: DC bias goes to only -475V Message-ID: From fatihs at snf.stanford.edu Mon Jun 5 20:50:45 2006 From: fatihs at snf.stanford.edu (fatihs at snf.stanford.edu) Date: Mon, 5 Jun 2006 20:50:45 -0700 Subject: Problem amtetcher SNF 2006-06-05 20:50:44: Low DC bias Message-ID: Same problem as weekend. For program3, it can't reach -530V. From pethe at snf.stanford.edu Tue Jun 6 03:05:45 2006 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Tue, 6 Jun 2006 03:05:45 -0700 Subject: Problem amtetcher SNF 2006-06-06 03:05:44: DC Bias not reached. RF Limit out on Program #2 Etch 1 Message-ID: From cbaxter at snf.stanford.edu Tue Jun 6 11:48:40 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 6 Jun 2006 11:48:40 -0700 Subject: Shutdown amtetcher SNF 2006-06-06 11:48:40: low dc bias and rf forward power. Message-ID: From cbaxter at snf.stanford.edu Wed Jun 7 08:53:57 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 7 Jun 2006 08:53:57 -0700 Subject: Shutdown amtetcher SNF 2006-06-06 11:48:40: low dc bias and rf forward power. Message-ID: max dc bias is -475, tool is ok to use for low bias setting. From latta at snf.stanford.edu Thu Jun 8 16:49:23 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Jun 2006 16:49:23 -0700 Subject: Problem amtetcher SNF 2006-06-06 03:05:44: DC Bias not reached. RF Limit out on Program #2 Etch 1 Message-ID: controller replaced. Etch rate good (367A oxide for prog 3) From latta at snf.stanford.edu Thu Jun 8 16:49:43 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Jun 2006 16:49:43 -0700 Subject: Problem amtetcher SNF 2006-06-05 20:50:44: Low DC bias Message-ID: contoller replaced From latta at snf.stanford.edu Thu Jun 8 16:49:59 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Jun 2006 16:49:59 -0700 Subject: Comment amtetcher SNF 2006-06-03 02:45:36: Previous user left chamber vented Message-ID: naughty person.... From latta at snf.stanford.edu Thu Jun 8 16:51:25 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Jun 2006 16:51:25 -0700 Subject: Comment amtetcher SNF 2006-06-02 03:22:58: Hot loop only at 26C Message-ID: Ok now From sanli at snf.stanford.edu Sun Jun 11 12:09:06 2006 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: Sun, 11 Jun 2006 12:09:06 -0700 Subject: Shutdown amtetcher SNF 2006-06-11 12:09:06: cooling hex? Message-ID: After turbo pumpdown it goes into this cooling hex step and stays there forever. From cbaxter at snf.stanford.edu Mon Jun 12 13:18:29 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 12 Jun 2006 13:18:29 -0700 Subject: Shutdown amtetcher SNF 2006-06-11 12:09:06: cooling hex? Message-ID: System cooling is fine.. From king at snf.stanford.edu Tue Jun 13 23:28:33 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 13 Jun 2006 23:28:33 -0700 Subject: Problem amtetcher SNF 2006-06-13 23:28:32: hot loop isn't hot Message-ID: It's 26C which causes condensation in the chamber when vented and longer pumpdowns. From cbaxter at snf.stanford.edu Wed Jun 14 08:31:23 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 14 Jun 2006 08:31:23 -0700 Subject: Shutdown amtetcher SNF 2006-06-14 08:31:22: lose hot loop heater.. Message-ID: From rwoo at snf.stanford.edu Wed Jun 14 10:29:18 2006 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Wed, 14 Jun 2006 10:29:18 -0700 Subject: Shutdown amtetcher SNF 2006-06-14 10:29:15: Low cold water level alarm Message-ID: From cbaxter at snf.stanford.edu Wed Jun 14 13:12:22 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 14 Jun 2006 13:12:22 -0700 Subject: Shutdown amtetcher SNF 2006-06-14 10:29:15: Low cold water level alarm Message-ID: From cbaxter at snf.stanford.edu Wed Jun 14 13:13:40 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 14 Jun 2006 13:13:40 -0700 Subject: Shutdown amtetcher SNF 2006-06-14 08:31:22: lose hot loop heater.. Message-ID: Changed heater coil for hot loop. now temp is @35C. From cbaxter at snf.stanford.edu Wed Jun 14 13:13:48 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 14 Jun 2006 13:13:48 -0700 Subject: Problem amtetcher SNF 2006-06-13 23:28:32: hot loop isn't hot Message-ID: From jhemanth at snf.stanford.edu Sat Jun 24 23:27:59 2006 From: jhemanth at snf.stanford.edu (jhemanth at snf.stanford.edu) Date: Sat, 24 Jun 2006 23:27:59 -0700 Subject: Problem amtetcher SNF 2006-06-24 23:27:58: Vacuum wands needs to be replaced Message-ID: From eenriquez at snf.stanford.edu Mon Jun 26 07:44:37 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 26 Jun 2006 07:44:37 -0700 Subject: Problem amtetcher SNF 2006-06-24 23:27:58: Vacuum wands needs to be replaced Message-ID: Repaired vacuum wand From lindaw at snf.stanford.edu Mon Jun 26 17:33:15 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 26 Jun 2006 17:33:15 -0700 Subject: Problem amtetcher SNF 2006-06-26 17:33:14: alarming Message-ID: "not ready oil pres out rng" message on display. From pethe at snf.stanford.edu Mon Jun 26 19:49:12 2006 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Mon, 26 Jun 2006 19:49:12 -0700 Subject: Problem amtetcher SNF 2006-06-26 19:49:11: Alarming - Turbo Off Message-ID: Turbo Off message on screen. From eenriquez at snf.stanford.edu Tue Jun 27 10:17:53 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 27 Jun 2006 10:17:53 -0700 Subject: Problem amtetcher SNF 2006-06-26 19:49:11: Alarming - Turbo Off Message-ID: The vacuum pump tripped off. Restarted vacuum pump. Ran standby recipe. From eenriquez at snf.stanford.edu Tue Jun 27 10:18:19 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 27 Jun 2006 10:18:19 -0700 Subject: Problem amtetcher SNF 2006-06-26 17:33:14: alarming Message-ID: The vacuum pump tripped off. Restarted vacuum pump. Ran standby recipe. From randalls at snf.stanford.edu Tue Jun 27 15:18:12 2006 From: randalls at snf.stanford.edu (randalls at snf.stanford.edu) Date: Tue, 27 Jun 2006 15:18:12 -0700 Subject: Comment amtetcher SNF 2006-06-27 15:18:12: Ardel cracking Message-ID: The ardel overlay on the top of the hex is cracking at the top corners above panel 2. I noticed some brownish dust nearby. From huangzb at snf.stanford.edu Thu Jun 29 13:59:59 2006 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Thu, 29 Jun 2006 13:59:59 -0700 Subject: Problem amtetcher SNF 2006-06-29 13:59:58: vacum tweezer is not working Message-ID: From mail at cnbwax.com Fri Jun 30 06:56:50 2006 From: mail at cnbwax.com (Citizens National Bank) Date: Fri, 30 Jun 2006 09:56:50 -0400 Subject: Your CNB online account has been limited Message-ID: An HTML attachment was scrubbed... URL: From eenriquez at snf.stanford.edu Fri Jun 30 09:24:06 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 Jun 2006 09:24:06 -0700 Subject: Problem amtetcher SNF 2006-06-29 13:59:58: vacum tweezer is not working Message-ID: Repaired vacuum tweezer. Please stop pulling the black button off the tweezer.