Problem amtetcher SNF 2006-06-02 20:01:46: amt etcher - reports low dc bias and plasma shuts down after 1 min into etch cycle

dansanga at snf.stanford.edu dansanga at snf.stanford.edu
Fri Jun 2 20:01:47 PDT 2006


dummy conditioning ran fine for 15 minutes with program 3.
first pass run stopped at 12 miln 55 seconds s- plasma stopped.  reported low dc bias.
tried from begining second pass after aborting first pass and repeating the process.  same problem again. something wrong with dc bias.
called ceasar baxter and left message for him.
dan




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