Problem amtetcher SNF 2006-06-02 20:22:49: amt etcher repeats low dc bias problem

dansanga at snf.stanford.edu dansanga at snf.stanford.edu
Fri Jun 2 20:22:50 PDT 2006


trlied third time and exactly with 12' 55" remaining of 14 min cycycle the plasma shuts down and the machine error message reads low dc bias.




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