Problem amtetcher SNF 2006-06-04 00:52:09: Note AMT Pgm #3 etch rate

[king at snf.stanford.edu]

In order to sustain a plasma the DC Bias was programmed for -475V instead of -530V.   If you run Pgm #3 at -475V please note that the etch rate of thermal oxide drops to about 254A/ min, about 110A/min lower than normal.