Problem amtetcher SNF 2006-06-05 11:25:48: DC bias goes to only -475V

riteshj at snf.stanford.edu riteshj at snf.stanford.edu
Mon Jun 5 11:25:49 PDT 2006


DC bias doesnt go all the way to -530V which has changed the etch rate. Would like it back to the original condition (-530V)




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