Shutdown amtetcher SNF 2006-06-06 11:48:40: low dc bias and rf forward power.
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Tue Jun 6 11:48:40 PDT 2006
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Problem amtetcher SNF 2006-06-06 03:05:44: DC Bias not reached. RF Limit out on Program #2 Etch 1
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Shutdown amtetcher SNF 2006-06-06 11:48:40: low dc bias and rf forward power.
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Problem amtetcher SNF 2006-06-06 03:05:44: DC Bias not reached. RF Limit out on Program #2 Etch 1
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Shutdown amtetcher SNF 2006-06-06 11:48:40: low dc bias and rf forward power.
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