Problem amtetcher SNF 2006-06-06 03:05:44: DC Bias not reached. RF Limit out on Program #2 Etch 1

latta at snf.stanford.edu latta at snf.stanford.edu
Thu Jun 8 16:49:23 PDT 2006

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controller replaced.  Etch rate good (367A oxide for prog 3)

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Next message: Shutdown amtetcher SNF 2006-06-06 11:48:40: low dc bias and rf forward power.
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