Comment amtetcher SNF 2006-06-02 03:22:58: Hot loop only at 26C
latta at snf.stanford.edu
latta at snf.stanford.edu
Thu Jun 8 16:51:25 PDT 2006
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Comment amtetcher SNF 2006-06-02 03:22:58: Hot loop only at 26C
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Problem amtetcher SNF 2006-06-02 20:01:46: amt etcher - reports low dc bias and plasma shuts down after 1 min into etch cycle
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Ok now
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Comment amtetcher SNF 2006-06-02 03:22:58: Hot loop only at 26C
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Problem amtetcher SNF 2006-06-02 20:01:46: amt etcher - reports low dc bias and plasma shuts down after 1 min into etch cycle
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