From jimkruger at snf.stanford.edu Thu Mar 2 12:14:31 2006 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Thu, 2 Mar 2006 12:14:31 -0800 Subject: Problem amtetcher SNF 2006-03-02 12:14:31: Prog2=standby is corrupted? Message-ID: From cbaxter at snf.stanford.edu Thu Mar 2 13:24:29 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 2 Mar 2006 13:24:29 -0800 Subject: Problem amtetcher SNF 2006-03-02 12:14:31: Prog2=standby is corrupted? Message-ID: Entered all recipes and put system on stand by From king at snf.stanford.edu Fri Mar 3 22:46:49 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 3 Mar 2006 22:46:49 -0800 Subject: Problem amtetcher SNF 2006-03-03 22:46:48: AMT pgm2 errors Message-ID: Shutdown program #2 has constant pressure errors. From riteshj at snf.stanford.edu Sat Mar 4 18:08:55 2006 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Sat, 4 Mar 2006 18:08:55 -0800 Subject: Problem amtetcher SNF 2006-03-04 18:08:54: Turbo overloaded problem Message-ID: IN recipe 2 during etch steps, the machine always alarms saying "turbo overloaded". Also during the etch stpes in other recipes, the disp[lay starts shwoing funny characters: #*!$#@&* and is messed up. I remember the same problem being reported last week. I think it is recurring. From eenriquez at snf.stanford.edu Sun Mar 5 10:19:50 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 5 Mar 2006 10:19:50 -0800 Subject: Problem amtetcher SNF 2006-03-04 18:08:54: Turbo overloaded problem Message-ID: Reseated all electronic boards. Re-entered all recipes. Tightened RF connector. Re-entered critical system constants. Ran several cycles with no problems. Please double check your recipes before running the system. From eenriquez at snf.stanford.edu Sun Mar 5 10:20:08 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 5 Mar 2006 10:20:08 -0800 Subject: Problem amtetcher SNF 2006-03-03 22:46:48: AMT pgm2 errors Message-ID: Reseated all electronic boards. Re-entered all recipes. Tightened RF connector. Re-entered critical system constants. Ran several cycles with no problems. Please double check your recipes before running the system. From king at snf.stanford.edu Wed Mar 8 17:51:48 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 8 Mar 2006 17:51:48 -0800 Subject: Shutdown amtetcher SNF 2006-03-08 17:51:47: SHUTDOWN AMT- many problems Message-ID: AMT continues to have the same problems as previously reported. Today it is unable to continue an etch for more than 30 seconds. A summary of problems: 1. Turbo Overload. Stops the etch. 2. #Garbled! # characters'? 3. Intermittent high process pressure and reflected power. 4. Normal etch rates substantially slowered. 5. Manometer head fails every pumpdown, sometimes twice noafter venting. 6. Hex jog fails to fully rotate. (these last two were problems before the main seal change around October). Apparently there must be other causes for these problems that haven't yet been found. Similar problems were on March 4, 3 and Feb 26, 23, 23, 22 and possibly more. Thanks very much. From eenriquez at snf.stanford.edu Wed Mar 8 23:52:21 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 8 Mar 2006 23:52:21 -0800 Subject: Shutdown amtetcher SNF 2006-03-08 17:51:47: SHUTDOWN AMT- many problems Message-ID: Observed that the garbled text and turbo overload only occured when the rf power was on. Shielded a control cable that was near the rf cable. Ran 3 complete etch cycle with no problems. Will continue to monitor problem. From latta at snf.stanford.edu Thu Mar 9 11:24:57 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 9 Mar 2006 11:24:57 -0800 Subject: Problem amtetcher SNF 2006-03-09 11:24:57: manometer and turbo overload errors Message-ID: still there. Got the turbo overload error twicew during a run but was able to continue the run by re-pushing the run button. From cbaxter at snf.stanford.edu Thu Mar 9 13:19:21 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 9 Mar 2006 13:19:21 -0800 Subject: Problem amtetcher SNF 2006-03-09 11:24:57: manometer and turbo overload errors Message-ID: adjusted bartatron using external tc gauge. From king at snf.stanford.edu Thu Mar 9 18:29:39 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 9 Mar 2006 18:29:39 -0800 Subject: Problem amtetcher SNF 2006-03-09 18:29:38: AMT Turbo Overload Message-ID: Update-- AMT gave two turbo overload errors during a 5 minute etch with Pgm 3. Also had 1 turbo overload error during a 2 miunte etch (plus the usual manometer head leaks). Thanks. From fengj at snf.stanford.edu Thu Mar 9 20:10:28 2006 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Thu, 9 Mar 2006 20:10:28 -0800 Subject: Problem amtetcher SNF 2006-03-09 20:10:25: HEAT XCHGR OFF Message-ID: From fengj at snf.stanford.edu Thu Mar 9 20:15:28 2006 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Thu, 9 Mar 2006 20:15:28 -0800 Subject: Problem amtetcher SNF 2006-03-09 20:15:25: Garble Characters Message-ID: Garble Characters like "!" and "#" appeared in the display panel when running a recipe. From eenriquez at snf.stanford.edu Thu Mar 9 20:59:09 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 9 Mar 2006 20:59:09 -0800 Subject: Problem amtetcher SNF 2006-03-09 20:10:25: HEAT XCHGR OFF Message-ID: Reset heat exchanger. Intermittent level sensor. Need to find a replacement. From eenriquez at snf.stanford.edu Mon Mar 13 23:45:23 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 13 Mar 2006 23:45:23 -0800 Subject: Comment amtetcher SNF 2006-03-13 23:45:23: Message-ID: From quickwin at snf.stanford.edu Tue Mar 14 09:53:32 2006 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Tue, 14 Mar 2006 09:53:32 -0800 Subject: Shutdown amtetcher SNF 2006-03-14 09:53:31: Heat exchanger off. Machine inoperable. Message-ID: From cbaxter at snf.stanford.edu Tue Mar 14 10:35:06 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 14 Mar 2006 10:35:06 -0800 Subject: Shutdown amtetcher SNF 2006-03-14 09:53:31: Heat exchanger off. Machine inoperable. Message-ID: primed lower heat exchanger and switched back toggle switch from manual to auto. From cbaxter at snf.stanford.edu Tue Mar 14 10:35:13 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 14 Mar 2006 10:35:13 -0800 Subject: Comment amtetcher SNF 2006-03-13 23:45:23: Message-ID: From cbaxter at snf.stanford.edu Tue Mar 14 10:35:34 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 14 Mar 2006 10:35:34 -0800 Subject: Problem amtetcher SNF 2006-03-09 20:15:25: Garble Characters Message-ID: tighten rf strap From cbaxter at snf.stanford.edu Tue Mar 14 10:35:40 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 14 Mar 2006 10:35:40 -0800 Subject: Problem amtetcher SNF 2006-03-09 18:29:38: AMT Turbo Overload Message-ID: From king at snf.stanford.edu Mon Mar 20 11:57:11 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 20 Mar 2006 11:57:11 -0800 Subject: Shutdown amtetcher SNF 2006-03-20 11:57:10: AMT Heat exchanger off Message-ID: Hopefully an easy fix? From cbaxter at snf.stanford.edu Mon Mar 20 12:54:57 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 20 Mar 2006 12:54:57 -0800 Subject: Shutdown amtetcher SNF 2006-03-20 11:57:10: AMT Heat exchanger off Message-ID: refilled and heat exchanger and re-start water pump. From king at snf.stanford.edu Mon Mar 20 14:45:32 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 20 Mar 2006 14:45:32 -0800 Subject: Comment amtetcher SNF 2006-03-20 14:45:31: Pgm 3- the base pressure Message-ID: was set to 0.80 mT. Reset back to 0.5mT. Did not check the other recipes. From king at snf.stanford.edu Fri Mar 24 11:27:28 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 24 Mar 2006 11:27:28 -0800 Subject: Problem amtetcher SNF 2006-03-24 11:27:27: repeated pressure failures Message-ID: Five failures in a five minute etch. Maybe Elmer found the problem when he looked at it last night. From cbaxter at snf.stanford.edu Fri Mar 24 18:35:46 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 24 Mar 2006 18:35:46 -0800 Subject: Problem amtetcher SNF 2006-03-24 11:27:27: repeated pressure failures Message-ID: From eenriquez at snf.stanford.edu Fri Mar 24 18:38:37 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Mar 2006 18:38:37 -0800 Subject: Problem amtetcher SNF 2006-03-24 11:27:27: repeated pressure failures Message-ID: Replaced the TC/ion gauge controller. "Manometer fail" errors has been eliminated. Still down for "Turbo overloaded" faults. From eenriquez at snf.stanford.edu Fri Mar 24 18:48:47 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Mar 2006 18:48:47 -0800 Subject: Shutdown amtetcher SNF 2006-03-24 18:48:47: Turbo overloaded faults Message-ID: The foreline pressure raises from 60 mT to around 300 mT when the plasma is on. Possible RF interference or low pump speed. From eenriquez at snf.stanford.edu Fri Mar 24 18:54:28 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Mar 2006 18:54:28 -0800 Subject: Shutdown amtetcher SNF 2006-03-24 18:48:47: Turbo overloaded faults Message-ID: Placing system on Problem not shutdown From eenriquez at snf.stanford.edu Fri Mar 24 18:54:54 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Mar 2006 18:54:54 -0800 Subject: Problem amtetcher SNF 2006-03-24 18:54:54: Turbo overload Message-ID: The foreline pressure raises from 60 mT to around 300 mT when the plasma is on. Possible RF interference or low pump speed From king at snf.stanford.edu Fri Mar 24 22:44:38 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 24 Mar 2006 22:44:38 -0800 Subject: Comment amtetcher SNF 2006-03-24 22:44:37: AMT test runs Message-ID: Cesar shielded the RF cable and it made a big improvement. Was able to run Pgm 3 for 20 minutes without failures. The foreline pressure varied up to about 270 mT without causing any problems and then decreased to about 145 after a few minutes. Thanks Cesar and Elmer. An etch rate test on Tox gave 366A/min which is close to normal. From king at snf.stanford.edu Fri Mar 24 22:47:43 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 24 Mar 2006 22:47:43 -0800 Subject: Comment amtetcher SNF 2006-03-24 22:47:43: correction... Message-ID: the foreline T/C cable was shielded.