Problem amtetcher SNF 2006-03-04 18:08:54: Turbo overloaded problem

riteshj at snf.stanford.edu riteshj at snf.stanford.edu
Sat Mar 4 18:08:55 PST 2006


IN recipe 2 during etch steps, the machine always alarms saying "turbo overloaded". Also during the etch stpes in other recipes, the disp[lay starts shwoing funny characters: #*!$#@&* and is messed up. I remember the same problem being reported last week. I think it is recurring.




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