Shutdown amtetcher SNF 2006-03-08 17:51:47: SHUTDOWN AMT- many problems

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Mar 8 23:52:21 PST 2006


Observed that the garbled text and turbo overload only occured when the rf power was on.  Shielded a control cable that was near the rf cable.  Ran 3 complete etch cycle with no problems.  Will continue to monitor problem.




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