Problem amtetcher SNF 2006-03-09 18:29:38: AMT Turbo Overload

[king at snf.stanford.edu]

Update--  AMT gave two turbo overload errors  during a 5 minute etch with Pgm 3.  Also had 1 turbo overload error during a 2 miunte etch  (plus the usual manometer head leaks).
Thanks.