Problem amtetcher SNF 2006-03-09 18:29:38: AMT Turbo Overload

king at snf.stanford.edu king at snf.stanford.edu
Thu Mar 9 18:29:39 PST 2006


Update--  AMT gave two turbo overload errors  during a 5 minute etch with Pgm 3.  Also had 1 turbo overload error during a 2 miunte etch  (plus the usual manometer head leaks).
Thanks.




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