Problem amtetcher SNF 2006-03-24 18:54:54: Turbo overload
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Mar 24 18:54:54 PST 2006
The foreline pressure raises from 60 mT to around 300 mT when the plasma is on. Possible RF interference or low pump speed
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