Comment amtetcher SNF 2006-03-24 22:44:37: AMT test runs

king at snf.stanford.edu king at snf.stanford.edu
Fri Mar 24 22:44:38 PST 2006


Cesar shielded the RF cable and it made a big improvement.  Was able to run Pgm 3 for 20 minutes without failures.  The foreline pressure varied up to about 270 mT without causing any problems and then decreased to about 145 after a few minutes.  Thanks Cesar and Elmer.  
An etch rate test on Tox gave 366A/min which is close to normal.




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