From sanli at snf.stanford.edu Fri May 5 11:12:51 2006 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: Fri, 5 May 2006 11:12:51 -0700 Subject: Problem amtetcher SNF 2006-05-05 11:12:50: one of thew dummy wafers broke Message-ID: one of thew dummy wafers broke, it has to be cleaned. From eenriquez at snf.stanford.edu Fri May 5 14:13:31 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 5 May 2006 14:13:31 -0700 Subject: Problem amtetcher SNF 2006-05-05 11:12:50: one of thew dummy wafers broke Message-ID: User removed all the broken wafer pieces. From latta at snf.stanford.edu Fri May 5 16:24:59 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 5 May 2006 16:24:59 -0700 Subject: Comment amtetcher SNF 2006-03-20 14:45:31: Pgm 3- the base pressure Message-ID: noted From latta at snf.stanford.edu Fri May 5 16:25:48 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 5 May 2006 16:25:48 -0700 Subject: Problem amtetcher SNF 2006-03-24 18:54:54: Turbo overload Message-ID: shielding installed From latta at snf.stanford.edu Fri May 5 16:26:13 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 5 May 2006 16:26:13 -0700 Subject: Comment amtetcher SNF 2006-04-21 11:30:07: AMT Turbo problems Message-ID: squared away... From king at snf.stanford.edu Fri May 12 00:55:37 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 12 May 2006 00:55:37 -0700 Subject: Problem amtetcher SNF 2006-05-12 00:55:37: wafer clips broken off Message-ID: A couple of the wafer clips are broken so the wafer is only held by three clips (and therefore possibly not flat-- avoid loading process wafers there). Check the fourth and sixth hex positions. From cbaxter at snf.stanford.edu Mon May 15 08:19:26 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 15 May 2006 08:19:26 -0700 Subject: Problem amtetcher SNF 2006-05-12 00:55:37: wafer clips broken off Message-ID: Changed two broke wafer clips. From cbaxter at snf.stanford.edu Mon May 15 08:20:53 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 15 May 2006 08:20:53 -0700 Subject: Comment amtetcher SNF 2006-04-27 10:29:07: plastic piece Message-ID: Changed clips From huangzb at snf.stanford.edu Tue May 16 01:13:45 2006 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Tue, 16 May 2006 01:13:45 -0700 Subject: Problem amtetcher SNF 2006-05-16 01:13:44: tweezer is broken Message-ID: The tweezer of AMTetcher is broken From cbaxter at snf.stanford.edu Tue May 16 08:11:13 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 16 May 2006 08:11:13 -0700 Subject: Problem amtetcher SNF 2006-05-16 01:13:44: tweezer is broken Message-ID: changed vacuum wand. From AccountsReview at WAMU.com Thu May 18 04:23:30 2006 From: AccountsReview at WAMU.com (Washington Mutual Bank) Date: Thu, 18 May 2006 07:23:30 -0400 (EDT) Subject: Security Message: Confirm your personal details Message-ID: <20060518112330.1B3164100C@webserver.kpsupport.com> An HTML attachment was scrubbed... URL: From king at snf.stanford.edu Thu May 18 22:04:17 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 18 May 2006 22:04:17 -0700 Subject: Shutdown amtetcher SNF 2006-05-18 22:04:17: Arcing on hex 2 Message-ID: Program 3. It was fine in the beginning of the etch, then gave an error "DC Bias Low" and stopped the process. Inspection shows arcing. Left it vented with only dummy wafers loaded. From eenriquez at snf.stanford.edu Thu May 18 23:47:32 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 18 May 2006 23:47:32 -0700 Subject: Shutdown amtetcher SNF 2006-05-18 22:04:17: Arcing on hex 2 Message-ID: Cleaned up hex 2 and replaced burnt ardel parts. Dummy wafers are getting too thin. Will ask Nancy to replace them with new ones. From SalesTeam at academic-software-outlet.com Fri May 19 17:47:49 2006 From: SalesTeam at academic-software-outlet.com (Adobe Software Sales) Date: Fri, 19 May 2006 20:47:49 -0400 Subject: Adobe Education Software Specials Message-ID: <6fe66f11769e3d71688925cf19db17@xlkv4i3086r> Adobe Macromedia Studio 8 @ 71% OFF, Adobe Premiere Pro 2.0 at 67% OFF, !!!!!!!!!!!!!!!!!!!!!!!! ADOBE EDUCATION SALE - BUY NOW !!!!!!!!!!!!!!!!!!!!!!!! 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From riteshj at snf.stanford.edu Mon May 22 13:49:46 2006 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Mon, 22 May 2006 13:49:46 -0700 Subject: Problem amtetcher SNF 2006-05-22 13:49:44: vacuum wand doesnt work Message-ID: From eenriquez at snf.stanford.edu Mon May 22 22:39:40 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 22 May 2006 22:39:40 -0700 Subject: Problem amtetcher SNF 2006-05-22 13:49:44: vacuum wand doesnt work Message-ID: Repaired vacuum wand From king at snf.stanford.edu Tue May 30 20:27:16 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 30 May 2006 20:27:16 -0700 Subject: Problem amtetcher SNF 2006-05-30 20:27:16: AMT endless hex cooling mode Message-ID: it won't run pgm 2. From cbaxter at snf.stanford.edu Wed May 31 11:15:07 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 31 May 2006 11:15:07 -0700 Subject: Problem amtetcher SNF 2006-05-30 20:27:16: AMT endless hex cooling mode Message-ID: reboot system.....