Shutdown amtetcher SNF 2006-05-18 22:04:17: Arcing on hex 2

king at king at
Thu May 18 22:04:17 PDT 2006

Program 3.  It was fine in the beginning of the etch, then gave an error "DC Bias Low" and stopped the process.    Inspection shows arcing.  Left it vented with only dummy wafers loaded.

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