Shutdown amtetcher SNF 2006-05-18 22:04:17: Arcing on hex 2

king at snf.stanford.edu king at snf.stanford.edu
Thu May 18 22:04:17 PDT 2006


Program 3.  It was fine in the beginning of the etch, then gave an error "DC Bias Low" and stopped the process.    Inspection shows arcing.  Left it vented with only dummy wafers loaded.




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