From latta at snf.stanford.edu Wed Nov 1 09:35:08 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 1 Nov 2006 09:35:08 -0800 Subject: Comment amtetcher SNF 2006-11-01 09:35:08: Grounding strap should be replaced.... Message-ID: by about 2:00 today. From Education at academic-software-outlet.com Wed Nov 1 10:43:33 2006 From: Education at academic-software-outlet.com (Education Sales Team) Date: Wed, 1 Nov 2006 13:43:33 -0500 Subject: Mega Academic Discounts on Thousands of Products Message-ID: <38607957ba021db272bf44e4b3b933@bmw> 10,000 New Products at Heavily Discounted Academic Prices!!!! 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From cbaxter at snf.stanford.edu Thu Nov 2 15:51:08 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 2 Nov 2006 15:51:08 -0800 Subject: Comment amtetcher SNF 2006-11-02 15:51:07: Problem Message-ID: I installed the new ground strap but, when I power up the tool the turbo pump will not ramp up to speed. I removed the turbo pump and checked it out, it was seized. The turbo pump will need to be change. From cbaxter at snf.stanford.edu Fri Nov 3 12:31:45 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 3 Nov 2006 12:31:45 -0800 Subject: Shutdown amtetcher SNF 2006-10-31 14:38:06: pressure out of limit Message-ID: Installed new ground strap and newly rebuild turbo pump. Run seasoning and plasma clean cycle. From tura at snf.stanford.edu Sat Nov 4 08:45:45 2006 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Sat, 4 Nov 2006 08:45:45 -0800 Subject: Problem amtetcher SNF 2006-11-04 08:45:44: "TURBO WENT OFF" Message-ID: It is displaying "TURBO WENT OFF" and "NOT READY". "Abort" and "Run" buttons are disabled, so I believe the machine can't be used untill someone resets the turbo. From king at snf.stanford.edu Sat Nov 4 12:45:55 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Sat, 4 Nov 2006 12:45:55 -0800 Subject: Comment amtetcher SNF 2006-11-04 12:45:54: Restarted the turbo Message-ID: OK to run for now. If it fails today, find Eric P or me. From cbaxter at snf.stanford.edu Mon Nov 6 08:15:44 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 6 Nov 2006 08:15:44 -0800 Subject: Comment amtetcher SNF 2006-11-04 12:45:54: Restarted the turbo Message-ID: Installed back original turbo controller. From cbaxter at snf.stanford.edu Mon Nov 6 08:15:50 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 6 Nov 2006 08:15:50 -0800 Subject: Problem amtetcher SNF 2006-11-04 08:45:44: "TURBO WENT OFF" Message-ID: From kupnik at snf.stanford.edu Mon Nov 6 18:48:29 2006 From: kupnik at snf.stanford.edu (kupnik at snf.stanford.edu) Date: Mon, 6 Nov 2006 18:48:29 -0800 Subject: Problem amtetcher SNF 2006-11-06 18:48:28: hexode moving problem Message-ID: hexode sometimes is not moving back completely into homeposition. It is possible to press bell down and silence alarm a couple of times to get it back in home position. From cbaxter at snf.stanford.edu Tue Nov 7 07:47:53 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 7 Nov 2006 07:47:53 -0800 Subject: Problem amtetcher SNF 2006-11-06 18:48:28: hexode moving problem Message-ID: From king at snf.stanford.edu Tue Nov 7 22:29:21 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 7 Nov 2006 22:29:21 -0800 Subject: Problem amtetcher SNF 2006-11-07 22:29:20: Multiple hex rotation errors Message-ID: when returning to home position. From cbaxter at snf.stanford.edu Wed Nov 8 10:53:37 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 8 Nov 2006 10:53:37 -0800 Subject: Shutdown amtetcher SNF 2006-11-08 10:53:37: hex home encoder is bad. Message-ID: From latta at snf.stanford.edu Wed Nov 8 11:29:05 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 8 Nov 2006 11:29:05 -0800 Subject: Comment amtetcher SNF 2006-11-01 09:35:08: Grounding strap should be replaced.... Message-ID: strap replaced From latta at snf.stanford.edu Wed Nov 8 11:30:54 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 8 Nov 2006 11:30:54 -0800 Subject: Comment amtetcher SNF 2006-11-02 15:51:07: Problem Message-ID: turbo replaced. This should have been a shutdown message rather than a comment... From cbaxter at snf.stanford.edu Wed Nov 8 15:12:39 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 8 Nov 2006 15:12:39 -0800 Subject: Comment amtetcher SNF 2006-11-08 15:12:39: Need to changed encoder wheel. Message-ID: From cbaxter at snf.stanford.edu Thu Nov 9 11:35:13 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 9 Nov 2006 11:35:13 -0800 Subject: Shutdown amtetcher SNF 2006-11-08 10:53:37: hex home encoder is bad. Message-ID: Changed encoder wheel and align hex. From cbaxter at snf.stanford.edu Thu Nov 9 11:35:21 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 9 Nov 2006 11:35:21 -0800 Subject: Comment amtetcher SNF 2006-11-08 15:12:39: Need to changed encoder wheel. Message-ID: From cbaxter at snf.stanford.edu Thu Nov 9 11:35:34 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 9 Nov 2006 11:35:34 -0800 Subject: Problem amtetcher SNF 2006-11-07 22:29:20: Multiple hex rotation errors Message-ID: From eenriquez at snf.stanford.edu Thu Nov 9 13:50:54 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 9 Nov 2006 13:50:54 -0800 Subject: Problem amtetcher SNF 2006-11-09 13:50:53: Vacuum pump making loud noise Message-ID: Sending out spare pump for a rebuild. Need to replace noisy pump as soon as we receive the rebuilt pump. From tura at snf.stanford.edu Thu Nov 9 14:18:20 2006 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Thu, 9 Nov 2006 14:18:20 -0800 Subject: Problem amtetcher SNF 2006-11-09 14:18:19: oil pressure out of range error Message-ID: it gave the alarm "oil pressure out of range" a few times. it seems to run fine after a few tries, hopefully the error doesn't happen during the etch step. From mcvittie at snf.stanford.edu Thu Nov 9 19:04:18 2006 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Thu, 9 Nov 2006 19:04:18 -0800 Subject: Shutdown amtetcher SNF 2006-11-09 19:04:18: ATM Mech pump: Low oil & lots of noise Message-ID: I shutdown the ATM etcher because it gave a low oil pressure warning and the mech pump was making lots of noise. Jim From eenriquez at snf.stanford.edu Tue Nov 14 11:29:29 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 14 Nov 2006 11:29:29 -0800 Subject: Shutdown amtetcher SNF 2006-11-09 19:04:18: ATM Mech pump: Low oil & lots of noise Message-ID: Installed new pump. Ran clean and conditioning recipe 3 X. From eenriquez at snf.stanford.edu Tue Nov 14 11:30:25 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 14 Nov 2006 11:30:25 -0800 Subject: Problem amtetcher SNF 2006-11-09 14:18:19: oil pressure out of range error Message-ID: Reconnnected pressure sensor. From eenriquez at snf.stanford.edu Tue Nov 14 11:33:02 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 14 Nov 2006 11:33:02 -0800 Subject: Problem amtetcher SNF 2006-11-09 13:50:53: Vacuum pump making loud noise Message-ID: Replaced Leybold D60 with an Edwards 80 pump. From eenriquez at snf.stanford.edu Tue Nov 14 11:41:02 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 14 Nov 2006 11:41:02 -0800 Subject: Problem amtetcher SNF 2006-11-14 11:41:01: Hex did not move alarm. Message-ID: Will work on problem later. For now, just clear alarm and continue. From eenriquez at snf.stanford.edu Tue Nov 14 11:44:03 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 14 Nov 2006 11:44:03 -0800 Subject: Problem amtetcher SNF 2006-11-14 11:44:03: Loud noise from gate valve Message-ID: Gate valve makes a loud noise when closing. From cbaxter at snf.stanford.edu Wed Nov 15 08:18:59 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 15 Nov 2006 08:18:59 -0800 Subject: Problem amtetcher SNF 2006-11-14 11:41:01: Hex did not move alarm. Message-ID: adjusted encoder sensor position From cbaxter at snf.stanford.edu Wed Nov 15 08:19:07 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 15 Nov 2006 08:19:07 -0800 Subject: Problem amtetcher SNF 2006-11-14 11:44:03: Loud noise from gate valve Message-ID: From mtang at snf.stanford.edu Wed Nov 15 09:10:05 2006 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 15 Nov 2006 09:10:05 -0800 Subject: Comment amtetcher SNF 2006-11-15 09:10:04: Update Message-ID: Gate valve is noisy, but still can be used. Will be repaired over shutdown. From fengj at snf.stanford.edu Sat Nov 18 01:58:41 2006 From: fengj at snf.stanford.edu (fengj at snf.stanford.edu) Date: Sat, 18 Nov 2006 01:58:41 -0800 Subject: Problem amtetcher SNF 2006-11-18 01:58:40: some clips are too short Message-ID: The clips on the 3rd and 4th tray have become too short to clip the wafers well. From cbaxter at snf.stanford.edu Sun Nov 19 09:26:43 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 19 Nov 2006 09:26:43 -0800 Subject: Problem amtetcher SNF 2006-11-18 01:58:40: some clips are too short Message-ID: Clips are still ok. the clips on all the trays are schedule to be change on the yearly pm during the xmas shutdown.