From karthikv at snf.stanford.edu Tue Dec 4 01:38:16 2007 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Tue, 4 Dec 2007 01:38:16 -0800 Subject: Problem amtetcher SNF 2007-12-04 01:38:15: Turbo not pumping to base Message-ID: Tried three times with no luck. The chamber was kept open for about 5 mins while loading wafers. From jsuarez at snf.stanford.edu Tue Dec 4 13:45:03 2007 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Tue, 4 Dec 2007 13:45:03 -0800 Subject: Comment amtetcher SNF 2007-12-04 13:45:02: Turbo pumpdown was OK Message-ID: did not encounter any problem From rissman at snf.stanford.edu Thu Dec 6 09:03:42 2007 From: rissman at snf.stanford.edu (rissman at snf.stanford.edu) Date: Thu, 6 Dec 2007 09:03:42 -0800 Subject: Problem amtetcher SNF 2007-12-04 01:38:15: Turbo not pumping to base Message-ID: Has been used. Will continue to monitor. From emyers at snf.stanford.edu Sat Dec 8 05:00:47 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sat, 8 Dec 2007 05:00:47 -0800 Subject: Problem amtetcher SNF 2007-12-08 05:00:47: Lost Programs Message-ID: Lost the programs due to power outage From cbaxter at snf.stanford.edu Mon Dec 10 07:47:23 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 10 Dec 2007 07:47:23 -0800 Subject: Problem amtetcher SNF 2007-12-08 05:00:47: Lost Programs Message-ID: programed all the recipes. From ofidaner at snf.stanford.edu Mon Dec 10 15:14:56 2007 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Mon, 10 Dec 2007 15:14:56 -0800 Subject: Problem amtetcher SNF 2007-12-10 15:14:56: cannot run recipes Message-ID: When I move the belljar down, "vent" button is lit, but "run" button is not. From cbaxter at snf.stanford.edu Tue Dec 11 07:50:00 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 11 Dec 2007 07:50:00 -0800 Subject: Problem amtetcher SNF 2007-12-10 15:14:56: cannot run recipes Message-ID: System running ok, the generator wad off. From king at snf.stanford.edu Wed Dec 12 21:12:38 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 12 Dec 2007 21:12:38 -0800 Subject: Problem amtetcher SNF 2007-12-12 21:12:38: Gas Flow Error Messages Message-ID: The AMT etches fine but gives errors with Program 3 every time: "ERR FL1 WAIT PR FLOW 1 OUT LIMIT." It toggles between WAIT and RDY even though the flow was good and steady (gas 1= 6 of 6 setpoint). Needed to try several times each etch before it would fire up. Also got venting errors. The shutdown Pgm 2 was fine. Maybe these problems started with the power shutdown. Etch rate tests looked good. From bchui at snf.stanford.edu Wed Dec 12 21:51:11 2007 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Wed, 12 Dec 2007 21:51:11 -0800 Subject: Comment amtetcher SNF 2007-12-12 21:51:10: gas5 reads "2" instead of "0" Message-ID: Maybe this is related to the previous problem report From cbaxter at snf.stanford.edu Thu Dec 13 11:21:40 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 13 Dec 2007 11:21:40 -0800 Subject: Problem amtetcher SNF 2007-12-12 21:12:38: Gas Flow Error Messages Message-ID: Preform gas flow cal on gas#1 #6 ,10, 20, 30, 40, 50, 60 and 80% and run recipe#3 w/out problem. From mislam at snf.stanford.edu Thu Dec 13 13:48:46 2007 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Thu, 13 Dec 2007 13:48:46 -0800 Subject: Problem amtetcher SNF 2007-12-13 13:48:45: Won't tun, Waits for flow stabilization long time Message-ID: Notice Gas5 (NF3) flow reads 2 all the time From cbaxter at snf.stanford.edu Thu Dec 13 14:50:44 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 13 Dec 2007 14:50:44 -0800 Subject: Problem amtetcher SNF 2007-12-13 13:48:45: Won't tun, Waits for flow stabilization long time Message-ID: Zeroed gas#5 From elvislin at snf.stanford.edu Thu Dec 13 20:13:31 2007 From: elvislin at snf.stanford.edu (elvislin at snf.stanford.edu) Date: Thu, 13 Dec 2007 20:13:31 -0800 Subject: Problem amtetcher SNF 2007-12-13 20:13:31: flow 1 out limit Message-ID: From cbaxter at snf.stanford.edu Fri Dec 14 10:05:00 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 14 Dec 2007 10:05:00 -0800 Subject: Problem amtetcher SNF 2007-12-13 20:13:31: flow 1 out limit Message-ID: Changed constant torrerance for afc limit from 5% to 10%. From iwjung at snf.stanford.edu Sat Dec 15 05:43:55 2007 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Sat, 15 Dec 2007 05:43:55 -0800 Subject: Problem amtetcher SNF 2007-12-15 05:43:50: cannot pumpdown to base Message-ID: Cannot pumpdown to base even with many tries From cbaxter at snf.stanford.edu Sun Dec 16 07:14:38 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 16 Dec 2007 07:14:38 -0800 Subject: Problem amtetcher SNF 2007-12-15 05:43:50: cannot pumpdown to base Message-ID: Run recipe#2 and #3 w/out problem From kimsora at snf.stanford.edu Mon Dec 17 01:54:22 2007 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Mon, 17 Dec 2007 01:54:22 -0800 Subject: Problem amtetcher SNF 2007-12-17 01:54:21: cannot pump down. Message-ID: From cbaxter at snf.stanford.edu Mon Dec 17 07:55:40 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 17 Dec 2007 07:55:40 -0800 Subject: Comment amtetcher SNF 2007-12-12 21:51:10: gas5 reads "2" instead of "0" Message-ID: From cbaxter at snf.stanford.edu Mon Dec 17 07:56:40 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 17 Dec 2007 07:56:40 -0800 Subject: Comment amtetcher SNF 2007-12-04 13:45:02: Turbo pumpdown was OK Message-ID: From cbaxter at snf.stanford.edu Mon Dec 17 08:07:12 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 17 Dec 2007 08:07:12 -0800 Subject: Problem amtetcher SNF 2007-12-17 01:54:21: cannot pump down. Message-ID: